Field Emission Scanning Electron Microscope High Resolution Imaging of Nanoscale Materials

For developing new technologies, it is important to characterize the microstructure of materials with high spatial resolution at the nanoscale. To achieve high resolution, field emission scanning electron microscopes (FE-SEM) were developed. These microscopes allow working at low accelerating voltage, below 5 kV, to take advantage of the reduction of the interaction volume with accelerating voltage. Furthermore, their higher gun brightness compared to conventional thermo-electronic emitters, allow a probe size at the nanoscale. At low accelerating voltage, the emission volume of backscatter and secondary electron (SE) of the type II signals approach that of SEI signals. However, it is not enough to reach the highest resolution. A magnetic field above the sample improves the spatial resolution by collecting mostly high-resolution signals. In addition, the energy-filtration of the electron signals allows selecting the type of contrast detected: topographic, compositional, or crystallographic. The development of these new technologies permits to extend the imaging capabilities of the SEM towards new nanoscale applications.