Friction and Wear Performance of Unbalanced Magnetron Sputter-Deposited Diamond-Like Carbon Multilayer Coatings

"Two types of diamond-like carbon (DLC) films with different microstructures were prepared by unbalanced magnetron sputtering, and the tribological properties of the nanoscaled DLC multilayer coatings consisting of alternating layers of graphitelike and amorphous-like microstructures were examined. The DLC microstructure was characterized by certain features of graphite-like clusters, in that some of them had onion-like structures. The films filled with the clusters were obtained in a condition with an incidence of high influx of energetic electrons, and the other films without apparent cluster structures were formed in a condition with ion bombardment controlled by negative bias voltage applied to substrates. Stacking each film layer-by-layer, the nanoscaled multilayered coatings showed superior tribological properties to individual single-layered films due to the combination of properties induced by the difference of microstructures.IntroductionIn various tribologiql applications, it is necessary for diamond like carbon (DLC) coatings to have adequate adhesion, significant hardness and a concomitant low friction coefficient. A number of deposition techniques and coating structures have been proposed to achieve suitable DLC properties [1-3]. However it is still difficult to obtain a satisfactory level of combination of the properties particularly desirable for engineering applications.In this study, the features of unbalanced magnetron sputtering were demonstrated with the effect of ion and electron bombardment. Two types of microstructures , namely amorphous-like and graphite-like, were prepared by changing the condition of the charged particles bombardment during deposition. Using the difference of properties induced by the microstructures, nanoscaled DLC multilayered structures were examined in an attempt to improve tribological properties."