Important Factors to Consider in FIB Milling of Crystalline Materials

In recent years FIB has become a powerful instrument to perform ion beam sectioning and site-specific TEM specimen preparation. However, there are still gaps in understanding FIB-induced artifacts. Gallium ion beam damage and specimen heating during FIB milling can produce unwanted artifacts during FIB work.Calculations ofmaximumspecimentemperature increaseshavemostlybeen based on the assumption that ion beam implantation into substrate of infinite size. This deviates from finite specimen volume in FIB TEM specimen preparation that impedes specimen heat dissipation. In this paper, the authors will demonstrate a few commonly observed FIB artifacts, and discuss the concerns of specimen temperature rise during FIB milling process.