Modeling of stresses induced by oxidation process

Competition between stress generation and relaxation mechanisms during the oxidation process has been observed. However, the nature of the intrinsic growth stress in thermally grown scales is not well understood. In this talk, we will propose a conceptual model to calculate the intrinsic growth stress based on the analysis of stress-driven diffusional process of oxygen ions along the oxide grain boundary. The calculated stress, which is considered to originate from the constrained lateral expansion of the oxide, is in agreement with a range of experimental observations.