MOS hydrogen sensor array for 2D gas distribution mapping

A MOS capacitor hydrogen sensor array is reported for hydrogen gas distribution mapping. Si(100) was used as substrate for film deposition. After silicon oxide growing on the silicon surface with dry thermal oxidation, palladium film was sputtered on silicon oxide as hydrogen-sensitive gate material in MOS structure. The 3x3 sensor array was patterned on silicon substrate and packaged in one chip. Sensors' response was test with impedance analyzer. The sensors in array were calibrated in the hydrogen concentration range from 10ppm to 10000ppm. The 2D hydrogen concentration distribution was obtained with the calibrated sensor array.