Part VII - Communications - Kinetics of WSi2 Growth on Silicon

The American Institute of Mining, Metallurgical, and Petroleum Engineers
Norikazu Hashimoto
Organization:
The American Institute of Mining, Metallurgical, and Petroleum Engineers
Pages:
3
File Size:
885 KB
Publication Date:
Jan 1, 1968

Abstract

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SILICIDE coatings on refractory metals are often applied by transporting a silicon halide vapor to a hot metal surface . The coatings are usually grown by solid-state diffusion reaction. The diffusion is often slower than the vapor transport and hence may become rate-controlling.
Citation

APA: Norikazu Hashimoto  (1968)  Part VII - Communications - Kinetics of WSi2 Growth on Silicon

MLA: Norikazu Hashimoto Part VII - Communications - Kinetics of WSi2 Growth on Silicon. The American Institute of Mining, Metallurgical, and Petroleum Engineers, 1968.

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