Production and Characterization of Silicon Oxynitride

Silicon oxynitride, Si2N20, has many of the intrinsic properties of a potential high temperature engineering ceramic material. Some of these properties are similar to those of silicon nitride, which has been more intensively studied. However, although silicon nitride ceramics are approaching a state of microstructural refinement for various engineering applications, silicon oxynitride has received little attention. This has been mainly due to a lack of an economical and reproducible method of producing pure crystalline Si2N2O. Several reports exist on the preparation of crystalline Si2N2O from SiO2 and Si3N4, yet very little kinetic data exist. Even less is known about the carbothermic reduction of SiO2 in a nitrogen atmosphere to produce Si2N2O. In this paper, a review of the properties and methods of preparing silicon oxynitride will be presented. In addition, results obtained by reactively sintering SiO2 and Si3N4 will be discussed. The overall reaction is as follows: