RI 6111 Design, Construction, And Evaluation Of An Electron Probe X-Ray Spectrograph

The electron optics, vacuum system, and sample stage assembly for the Bureau of Mines? electron probe X-ray spectrograph were purchased. Four scanning curved-crystal spectrometers, two reflection- and two transmission-type, were designed and constructed by the authors. The reflection spectrometers are placed in a vacuum chamber for measurement of long-wave-length X-radiation. Detection, pulse-amplitude discrimination, and recording circuits are provided for the simultaneous measurement of four X-ray spectral lines. Minimum spot size is approximately 2 microns in diameter at 30 kilovolts and a sample-to-ground current of 5 x 10-8 ampere. At this voltage and current the limit of detection with reflection spectrometers is less than 0.05 weight-percent for most elements. The limit of detection for elements determined by transmission-type spectrometers, evaluated at 35 kilovolts and 5 x 10-8 ampere, is approximately 0.1 weight--percent for all elements having excitation voltages below 20 kilovolts. In general, reflection spectrometers exhibited satisfactory but poorer resolution than the transmission type, resolution of the spectrometers being limited primarily by crystal imperfections, with greater mosaic structure being introduced by the grinding process for the reflection crystals. Several applications of the electron probe X-ray spectrograph are described. Analysis of a uranium-steel is discussed in detail to illustrate calculation of composition from measured X-ray intensities.