RI 7416 The Range In Metals And Metal Oxide Systems Of Heavy Ions In The Energy Range 60 To 400 Kev

Multiple-charged beams originating from a 300-kv ion accelerator are important tools in the study of metal surfaces and thin films. A knowledge of the particle range is necessary for an understanding of the interaction processes of the ions with the targets. Utilizing a theory developed by Lindhard for determining the range of low-energy ions in solids, the ranges of H, He, C, N, 0, and Ar ions in A1203, Al, Fe203, Fe304, CuO, Cu20, Fe, Cu, Sn, and W were calculated for the energy range 60 to 400 kev using a computer program written in BASIC. The range, presented in graphical form, is given in both µg/cm2 and angstroms. In addition, heavy ion ranges were calculated for comparison with published experimental values. For ions with Z > 5, the discrepancy between the calculated values and published experimental values generally ranged from 2 to 40 percent; the largest deviations were probably due to experimental error.