The Multi-component CrBMoS Solid Lubricant and Tribological Films Prepared by Pulsed Magnetron Sputtering from Powder Targets

Mixed CrB2 and MoS2 powder (Cr:Mo=1:1 atomic %), without any further process, were used as the targets to be sputtered and deposited onto stainless steel and silicon substrates by pulsed DC power supply. The structures and properties of the CrBMoS films were then analyzed by using SEM, XRD, micro-hardness tester. The SEM morphology of the films showed dense, defect free structure, and the preferred orientations of the films were CrB2 (111) and MoS2 (200) according to XRD spectra. The thicknesses of the films were measured and the relationship between the deposition rates and pulsed factors was determined. The films, with the micro-hardness as high as 19GPa and friction coefficient as low as 0.02, could be considered to be the hard solid lubricant films.