TiO2 Nanoparticle Coatings Investigated with Scanning Force Microscopy

Thin films of TiO2 nanoparticles have been prepared by different reactive deposition methods, such as electron evaporation, ion plating and ion beam sputtering. Many properties especially the optical properties, are strongly related to the film morphology and surface roughness. Scanning force microscopy was employed to obtain information on the surface structure of as-deposited Ti(h thin films. The influence of the deposition conditions and the film thickness on the optical and structural properties has been investigated. The as-deposited films were found to be amorphous or polycrystalline with anatase structure.