Ultra Fine Particle Deposition

UFP are defined by atoms or their clusters having diameter in the range of l0Å-0.l.um. Due to a ratio of very large surface area to volume, they have peculiar properties such as extra high surface energy. Recently UFP deposition technique may find its new applications to various areas such as conductive/resistive film formation. In this method, gas flow with UFP jet through the nozzle which is considered to be a free molecular flow is maintained at a very high speed (~100m/s). Using this technique, mixture film of Fe and Ni, and Ag/ Ag-Alloy etc. were obtained, and their mechanical and electro-magnetic properties were determined. The experimental results are pending. The test results and discussion will be presented in the main paper.