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By Francis M. Walters

THE problem of making iron-manganese alloys of scientific purity is a rather difficult one. They cannot be prepared in air because of the readiness with which the metals oxidize at the temperature of melting; and they cannot be prepared in vacuum because of the, high vapor pressure-of- manganese. The very property of: manganese which permits it to be purified interferes with the utilization of the best method of making pure alloys. Accordingly, it is necessary to use a gas atmosphere which will not affect the-properties of the alloys. The gases available for the purposes are hydrogen; helium and argon. Nitrogen forms intermetallic compounds with manganese very readily. Hydrogen, while valuable as a deoxidizer and having the advantage of being comparatively cheap, is explosive over a wide range and, has a rather high thermal conductivity. Helium is reported as, costing little but is difficult to secure at a reasonable price and also has a conductivity nearly as high as hydrogen. Since argon has a sufficiently low thermal conductivity, it has been selected for use in one induction furnace for melting, under a controlled, gas atmosphere, in spite of its cost, which is so high (70 cents to $1.50 per cubic foot) that it must be stored and purified.. Such a gas atmosphere-as argon makes necessary the use of the, high-frequency induction method of heating. This involves, a non-metallic container for the gas; .which is most conveniently of fused quartz or glass. The next

Jan 1, 1929

By M. W. Von Bernewitz

AN important regional meeting of the American Institute of Mining and Metallurgical Engineers was held, at Salt Lake City on Aug. 22 to 26, jointly with the fifth annual meeting of the Western Division of the American Mining Congress. The whole meeting was marked by enthusiasm, keen attention to the subjects under discussion, and many renewals of personal contacts. The trips to the various plants were well attended and the local press paid much attention to the meeting. The A. I. M. E. sessions began Aug. 23, with a non-technical morning session. J. 0. Elton, manager for the International Smelting Co., presided. The purpose of this session was to present in a non-technical manner the relation of flotation to mining, smelting, and the State. Ernest Gayford, metallurgist with the General En-gineering Co. of Salt Lake City, gave the definitions of flotation as suggested by Rickard, the dictionary, Weinig, and Taggart. The active agent in flotation is the air bubble, and the two prime requisites are the formation of bubbles and the creation of selective action of the bubbles for metallic particles instead of for gangue particles. Broadly, all the sulfides are floatable minerals, but the oxides, carbonates, silicates and sulfates are not. As far as Utah is concerned, flotation has been one of the greatest means of conserving its natural re-sources, because it has converted millions of tons of waste rock into pay ore; it is recovering millions of pounds of metal formerly lost in tailings; it has con-verted the zinc from a liability into an asset; and has kept thousands of men at work and distributed millions in dividends for the benefit of the State. As to the future of flotation, Mr. Gayford can con-ceive that the next 5 or 10 years may see as much, if not more, advance than was made in the preceding period. The big problem is dressing oxides, carbonates, silicates, and sulfates, and simplification of the number of reagents, also the separation of different gangue min-erals from one another.

Jan 10, 1927

By David C. Yang

INTRODUCTION Over the world, and especially in the United States, there is increasing dependence upon progressively lower grade ore deposits. These lower grade ores are frequently difficult or impossible to process due to complex mineral assemblages being very finely disseminated. Thus, many of the conventional mineral concentration methods are not applicable to these ores. For the last few decades, research in the more exotic mineral processing techniques has been conducted, both in universities and in governmental and industrial laboratories. Since its inception, the Institute of Mineral Research of Michigan Technological University (MTU) has devoted much of its attention to the problems of processing refractory, low grade ores. Recently a new flotation system was developed which shows promise of being applicable to a broad range of ore types. This process has been the subject of two allowed patent applications. This paper describes the details of such a flotation system which is potentially useful for treating ultrafine minerals. Some highlights of the testing program on a variety of iron ores and a group of lithium-bearing ores will be presented. EXPERIMENTAL PROCEDURES Both iron and lithium ore flotation treatments followed the same general procedures, with minor differences in pH and in reagent dosages. The method is rather simple, efficient and economical from the standpoint of recovery and the cost of reagents consumed.

Jan 1, 1979

By R. S. Montgomery

Laboratory experiments simulating rock drilling were conducted on a number of commercial grades of tungsten carbide in order to determine their wear rates when they are used as inserts in percussive rock drill bits. The test rock was Barre granite and tests were made at conditions similar to those of the carbide buttons near the periphery of a large, down-hole, button bit. In addition, some wear rate measurements were made at a low blow energy. Wear rates of these carbide buttons were an extremely sensitive function of their cobalt contents and hardnesses and were proportional to e-°.57Hup to a hardness of about 91 RA. The point of minimum wear rate, which occurs at about 92 RA, corresponds to the point of maximum compressive strength. Modern percussive rock drill bits have inserts of cemented tungsten carbide on their wear faces. These inserts have drastically reduced bit wear in comparison to that of earlier all steel bits. The most common cemented carbide grade used in percussive rock drill bits contains about ten weight percent cobalt, although grades containing more or less cobalt are also used. Contrary to the case with carbide in metal-cutting tools, alloying materials are rarely used in mining grades. There are a number of designs of rock bits in current use. The most common form is an X bit which has four chisel-form radial wings. The button bit is another important design and one which has been recently developed. This design uses a flat steel face studded with relatively small hemispherically tipped carbide buttons. These types are illustrated in Fig. 1. Studies have been made of the sliding wear of cemented tungsten carbide on rock 1-4 and multiple-impact fracture', 5-6, b~t there has been comparatively little published on the percussive wear of this material although the wear of the impact face is the most important. There is some available data on the rate of dulling of rock bit inserts in actual drilling 7 but no laboratory studies. Sliding wear studies are useful for understanding the wear of coal and mineral cutting tools and gauge wear of percussive drill bits. but the

Jan 1, 1970

By J. Richter, D. Schulze

J. Richter and D. Schulze (Deutschen Akademie der Wissenschafte zu Berlin)—Introduction. In a recent paper R. G. Garlick and H. B. Probst reported on experimental results of investigations of room-temperature slip in zone-melted tungsten single crystals.17 In the paper it was pointed out that slip lines could be detected with an optical microscope only after about 10 pet plastic strain of the crystal. In our investigations we could observe slip lines in tungsten single crystals of defined orientations already with an elongation of 0.02 to 0.03 pet.18"9 Experimental Technique and Results. The tungsten single crystals were produced from 4 to 5 mm sintered rods* as starting material by electron- beam zone melting. With single-zone-pass melting a speed of 0.5 mm per min was used, while three-pass melting could be handled at a speed of 3 mm per min. Crystal axis orientations were located in the shaded area of the stereographic triangle, see Fig. 6. Orientation 1 is located at about 18 deg and orientation 2 at about 5 deg on the great circle from [011] to [ill]. This corresponds approximately to the orientations P and M referred to by Garlick and Probst. Our single crystals had a length of about 70 mm and were profiled solely by electrolytic means, leaving grip ends at both ends of the crystals. Between the latter, a cylindrical crystal of 45 to 50 mm length and about 2.4 mm diam was obtained. The crystals were deformed at room temperature in a commercial tensile-testing machine to obtain a strain of 0.02 to 5 pet. The average strain rate e = eP/t for all tensile tests amounted to approximately 10 -6 to 10-5 per sec, with ep representing plastic strain and t the duration of applied stress. In Fig. 7 a crystal is shown elongated by 0.03 pet. The picture was obtained by means of an optical microscope. Figs. 8 and 9 give electron-microscopic pictures of slip lines of crystals elongated by 0.07 and 1.1 pet, respectively. For crystals with the orientation 1, see Fig. 6, only the two main slip systems (101)[111] and (110)[111] were found. With the crystals of group 2 the two main slip systems are again evident, with

Jan 1, 1965

By J. J. Kramer, W. A. Tiller, G. F. Bolling

The temperatures of solid-liquid interfaces have been measured during the growth of Sn-Pb alloy crystals which exhibited a cellulur substructure. A simple descriptive theory was used in combination with this data and the other measurable growth variables to predict some features of the solute segregation such as the intercell excess concentration and the depth of cell grooves during freezing. The effective distribution coefficient at the tip of a cell, a, was predicted and experimentally found to vary in the range, 1 >a > k0. At the lower limit, the severe segregation that must arise between dendritic cells was substantiated by various observations such as the existence of a second Phase even for alloys of only 0.2 wt pct Pb. ThE cellular morphology of a solid-liquid interface is known to coincide with the formation of a zone of constitutional supercooling ahead of the interface during growth.' The occurrence of various cell structures, (two-dimensional cells, regular cells, dendritic cells), has been quantitatively investigated,'2,4 but the segregation of solute which arises as a consequence of this mode of growth has only been examined qualitatively. An indirect method of obtaining the solute concentration at the tip of a cell cap during solidification has been de-

Jan 1, 1963

By Douglas Bunting

With the gradual exhaustion of the upper veins in the anthracite coal-fields, the problem of mining at greater depths acquires increasing importance and demands the consideration .of a number of important factors, one of which is the greater earth-pressure and the consequent necessity of stronger support for the roof. Under the pillar-and-chamber system, almost exclusively followed in the Northen anthracite-field, the highest economy in mining is generally secured by leaving, on first mining, pillars only sufficient to support safely the overlying strata. As to the necessary size of such pillars, the opinions of mining experts are widely divergent. In establishing the width of chambers and pillars, the thickness of vein and its depth below the surface have received little consideration. For instance, it has been quite usual to work both overlying and underlying veins with the same width of chambers and pillars, when the lower vein was two and one-half times as thick, and twice as far below the surface, as the upper. In view of the generally-accepted theory that the crushing-strength of coal-pillars of the same base-area becomes less with increased height, it is probable, in this instance at least, that the moat economical mining has not been secured. This question of adequate pillar-support is economically less important down to about 800 ft. than at greater depths; and it is with reference to mining at these greater depths that the study of the subject here presented has been prompted. The necessity of leaving larger pillars, involving greater mining-costs per ton and also smaller yields per acre, is one of the troubles of deep working. To mine without leaving adequate pillar-supports will result, sooner or later, in a squeeze. Limited areas, it is true, have been mined at certain widths of

Jan 1, 1912

By Hallan N. Marsh, Bruce H. Robinson

It is now generally recognized that to secure the greatest ultimate recovery of petroleum from a field it is necessary to maintain at all times the lowest possible ratio of gas to oil production. The numerous ways of securing low ratios are not so generally understood or practiced. To many operators, reduction of gas-oil ratio simply means "beaning back" wells, with resultant reduced production rate. This postponement of production is often considered and spoken of as "lost" production, with the result that control of gas-oil ratio is in disfavor with some operators. Various methods are herein discussed by which gas-oil ratio may be reduced, some of which invoLve no curtailment of current production, while others are accompanied by an actual increase of daily production. It is further shown that in cases where rate of production is reduced to conserve gas, the indicated ultimate recovery is generally increased. Principles involved are discussed, and conclusions are illustrated by data from the operation of wells. General Principles The rate and ratio in which oil and gas enter a well are solely dependent, so far as the operation of that well is concerned, upon the pressures maintained in the well opposite the producing strata at various times and at various depths. The method of getting the oil out of the hole, whether by natural flow, gas-lift, or pumping, has no effect upon either rate of production or ultimate recovery except through its effect upon pressures. Oil apparently enters wells according to some such equation as the following: R = KC(Pf - Pw)n Where R = rate of production. K = well coefficient, depending upon thickness of sand, and size and number of pores in the sand. C = fluid coefficient, depending upon viscosity, surface tension, etc.

Jan 1, 1929

By N. A. Gjostein

From their study of the anisotropy of grain boundary mobility in aluminum, the authors conclude that tilt boundaries have a higher mobility than twist boundaries because the atomic misfit at the pure-twist boundary is relatively small compared to the misfit at a tilt boundary for a given amount of misorientation. If this is true, then one would expect a twist boundary to have a lower grain boundary energy than the corresponding tilt boundary. Fig. 6, taken from the work of Gjostein and Rhines,10 shows that this is indeed the case for [001]-cu tilt and twist boundaries in the high-angle region, thus lending support to the authors' conclusion.

Jan 1, 1968

By D. L., Hayes

THE concentration of zinc ore in Wisconsin is a comparatively simple process, although it presents problems that must be overcome in an efficient manner in such a way that installation and operating costs are low. As the ore deposits are small, the first cost of the concentrating plant must be low; while the low margin of profit makes it necessary to have the minimum operating costs. The original mills were copied from those of the Joplin district, as most of them were built and operated by Joplin millmen. These served the purpose well; they made a clean concentrate, which was the chief requirement at that time, as most 'of the mines were' considerably 'richer than the average at the present time, and wages and supplies were also considerably lower. ' The apparatus used at present has changed very little in principle. . The grizzly opening has gradually been increased to 12 in. and sometimes no grizzly 'is used. The crusher, gradually grew in size, the largest crusher has -an opening of about 24 by 13 in. and a 7/8-in. throw on the. eccentric shaft.

Jan 1, 1921

By PHILIP N. MOORE

THE development of the power of the Tennessee River at Muscle Shoals has become a matter of political interest as well as engineering possibility. The controversy over it has been so active that the facts have been obscured, the possibilities exaggerated. Although the members of the American Institute of Mining & Metallurgical Engineers are not generally specialists in hydroelectric development, those who visited Muscle Shoals in October, following the Birmingham meeting of the Institute, were interested, and many of them surprised to learn the actual conditions. These have long been familiar to those who have studied the matter through the reports of the U. S. Engineers on the subject. The approved plan contemplates three dams-No. 1, a low dam close to the City of Florence, planned in the interests of navigation, since the construction of the other dams has rendered impossible the use of the river without it. No. 2-named the Wilson Dam is now under construction. Concerning it political argumentation has waged. No. 3 Dam-much smaller, is planned to be erected several miles above No. 2.

Jan 1, 1925

By R. E. Hummel, J. W. Koger

IT is generally accepted that the martensitic start temperature (Ms) can be determined by resistivity measurements and is that temperature where the resistivity vs temperature curve on cooling first deviates from a straight line.1-4 Both Titchener and ever' and pops5 have used resistivity measurements to follow the martensitic transformation in b1 Cu-Zn and ternary Cu-Zn-based b-phase alloys, respectively. Actually because of the nature of their measurements the temperature of minimum resistivity (M) was used by these authors to determine "Ms" . Also, due to experimental difficulties in detecting M, with resistivity measurements, Pops and Massalski 8 determined M, by optical microscopy. The present communication is concerned with high-precision, low-temperature resistivity measurements which reveal a definite M, temperature which differs from the temperature of minimum resistivity (M). It is also shown that M is merely the result of the geometry of the percent-transformation curve and the temperature coefficient of resistivity of the alloy. In other words, it will be demonstrated that M has no apparent significance (except that it denotes a temperature at which some percent of martensite can be detected in a given alloy). Alloy specimens were made by melting 99.999 pct Cu and 99.9999 pct Zn in sealed and evacuated quartz tubes and homogenizing them at 601PC for 300 hr. After the alloy was cold-rolled into foils suitable for resistivity measurements, it was quenched in ice water from 871PC. The chemical analysis showed a zinc content of 38.8 wt pct. The cooling rate during the martensite transformation was 1°C per min and was controlled with a thermistor. Electrical resistivity measurements were made using a K-3 type potentiometer; the reproducibility of the resistivity values was better than 0.03 pct. Temperatures were measured with a thermocouple to an accuracy of better than 0.2° C. Fig. 1 shows the resistivity vs temperature curves of the martensitic transformation in B1 Cu-Zn for both cooling and heating. The starting point of the martensitic transformation (M,) was taken as that

Jan 1, 1968

By C. D. Haynes, S. C. Gambrell

The practice of roof bolting in WORLD-WIDE mining activities is very well-known, having been used extensively for over 50 years. The theory of roof bolting, however, is extremely complicated, and only recently have investigators attempted to explain the theory. Various means of stress analysis have been utilized in rock mechanics, most of which reduce rock to an isotropic, homogeneous medium that can be easily analyzed. One of the indirect research methods is the photo-elastic technique, the theory of which is widely known and needs no elaboration. This technique has been used extensively to examine the state of stress around underground openings of various shapes in certain types of strata, and under various loading configurations.'-" In-Situ Mine Roof Trusses The photoelastic technique was employed here to evaluate the state of stress above a mine opening where support is provided by the in-situ mine roof truss. This support configuration, shown in Fig. 1, has gained popularity in recent years, particularly in mines with bad roof conditions." To the authors' knowledge, no scientific determination has been made of the advantages roof trusses may offer over conventional bolting configurations comparable to roof trusses. Ordinary mine roofs usually sag or bulge downward soon after mining. Normally, after some movement the roof begins to stabilize, but the face of this bulging mine rock is usually in tension and will almost always fail unless supported. Because rock fails easily in tension, it is desirable to "preload" the roof, that is, to impress a compressive force on the mine roof to prevent bulging and subsequent tensile failure. Ordinary rock bolting installations, particularly if the bolting is perpendicular to the mine roof plane, do not produce a preloading effect. Although bolting installations squeeze the strata together and produce a beam effect desirable for support, they do not have the advantage of actual uplift. They pull down at the anchorage point with a force equal to the bolt tension which sometimes causes a separation in the plane of the anchorage detrimental to roof strength. In-situ mine roof trusses require the installation of steel tension rods in the roof of the mine much the same as conventional roof bolts, except that the rods are arranged to produce a stress pattern above the upper surface of the opening similar to that of a prestressed beam. The roof rock acts to transmit the compression force. The simplest form of truss consists of two steel rods anchored to the back of holes drilled at an angle of approximately 45 over the mine pillars. These rods are collared near the middle of the room, and the lower ends of the rods are connected by tie rods and turn-buckles. Used in this manner, a small-diameter steel rod can provide essentially the same support as a wide-flange steel beam. By tightening the turnbuckles, an uplift on the roof can be produced. Objective of the Investigation The objective of this investigation was to determine qualitatively the state of stress that exists above a mine roof after the installation of the in-situ mine roof truss vs. that of two angle roof bolts, hereafter referred to as "roof bolts," drilled and placed in the same configuration, that is, 45" above each pillar and connected together in the middle of the room by a bearing member such as a steel beam. Each state of stress was to be identified, insofar as possible, as compression or tension above the mine opening. Model Construction A photoelastic model of a mine opening was coil-structed from -in. thick PLM-4B birefringent plastic and was machined to specification shown in Fig. 2. The dimensions of the opening were chosen to simulate a width-to-depth ratio of 3 to 1. Two % -in. holes were drilled at 45" angles, as shown, to provide for the loading devices. After construction, the model was annealed at 240°F to remove stresses produced during machining.

Jan 1, 1971

By W. S. Landis

WHEN dealing with a new reagent, one is concerned with three principal factors: available supply, cost, and results. The atmosphere contains an inexhaustible supply of oxygen mechanically mixed with nitrogen (omitting rare gases and minor impurities) in the proportions of one volume of oxygen to four volumes of nitrogen. (All figures are based on slide-rule precision and minor impurities are neglected.) Expressed in terms of weight, 1 ton of oxygen represents a volume of 22,500 cu. ft. and is contained in a volume of 112,000 cu. ft. of air. Water, also an inexhaustible supply, is a chemical compound containing 89 per cent. oxygen and, 11 per cent. hydrogen. Of the hundreds of schemes proposed for the enriching of air or separation of oxygen, nothing of value has yet appeared. From the standpoint of mechanical separation, liquefaction followed by rectification is the only process that has been developed to a really commercial stage. Theoretically, it should be a .simple matter to separate the mechanical mixture of nitrogen and oxygen; but fractionation can be performed only by converting to the liquid phase and this phase can be obtained only at lower than critical temperatures. The problem, therefore, is not so simple and the cost of the actual operation bears no relationship to the theoretical simplicity of the process. The largest single unit of the required apparatus so far placed in commercial use will handle only 60,000 cu. ft. of air per hour through a compressor which operates at a little over 250 lb. per sq. in. After this apparatus has operated continuously for 14 to 18 days it must be shut down for 6 to 8 hr. to be thawed out, have accumulated impurities removed and again cooled down for production. The cost of such a unit erected in batteries, with necessary spares for maintaining production, and including prime movers, hoisting and all auxiliary equipment, will be about $125,000. To produce one ton of oxygen per hour requires two operating machines of this size; and if the production is to be absolutely continuous a spare unit must be provided. To operate a plant of two units requires 10 or 11 men, excluding boiler attendants, if steam is generated in the plant.

Jan 11, 1924

Jan 1, 1880

By Ling Yang, John Henderson

Self-diffusion coefficients of copper in molten copper have been measured by the capillary reservoir method in the temperature range 1140o to 1260°C. The results can be represented by the equation D = [(1.46 * 0.01) x 10-3) exp [(-9710 * 710)/RT] cm2/sec. The energy of activation agrees within the limit of experimental uncertainty with that for viscous flow. The relationship between the diffusivity and coefficient of viscosity is best described by the equation D = kT/4pnr cm2/sec. MEASUREMENT was made of the self-diffusion coefficient of copper in molten copper in the temperature range 1413º to 1533ºK, using the capillary reservoir technique and CU64 as the radioactive tracer.The procedures for filling the capillaries, making the diffusion run and evaluating Dcu from the counting results were the same as described previously.1,2 All experimental operations involving the melt were carried out in a purified argon atmosphere. A graphite crucible, enclosed in a McDanel tube, was used as a container for the melt because of its satisfactory nature as a refractory material and the low solubility of carbon in copper. Graphite was also used for the capillary material. A McDanel thermocouple sheath, to which graphite radiation shields were affixed, was used to hold the capillaries. By moving this sheath through a rubber seal at the top of the McDanel tube, the capillaries could be lowered into or raised out of the melt. A Globar furnace with a constant temperature zone (± 2°C) of 2 in. was used to heat the assembly. The temperature of the furnace was the equilibrium value corresponding to a given setting of the transformer. Temperature was measured with a Pt-10 pct Rh/Pt thermocouple and varied during a run

Jan 1, 1962

By R. W. Vieth, S. A. Bradford

THE orientations of tetragonal tin crystals are commonly examined by either the transmission Laue method or the back-reflection Laue method. The predominant planes and zone axes of the pattern are plotted on a Wulff net and indexed by measuring the angles between planes and directions. The problem of identifying the Laue spots has been approached in several different ways. Nicholas 1 tabulated interplanar angles for ten planes but did not relate the angles to permutation of indices or sign. A table of angles between adjacent planes and of angles between adjacent zones was published by Chandrasekhar and veal.' These tables are very helpful, provided the film shows all the low-order zones that occur within about 20 deg of each other. Frounfelker and Hirthe's compilation3 of angles between the (001) plane and twenty-nine other planes is useful for the indexing, only if the (001) spot can be found on the film. For all but the simplest orientations, however, more information is needed to index the diffraction spots. Standard stereographic projections, such as those published by Bicelli, 4 provide part of the information required. By their nature, these projections show the positions of only a few zone axes. In the tetragonal system many low-order zone axes are not normal to the planes having the same indices. Consequently, planes and directions can have entirely different positions on a stereographic projection. For example, the [011] zone axis is 33 deg from the normal to the (011) plane. The crystallographic orientation usually has to be deduced from a combination of the predominant zone axes and a few low-order planes that appear on the film. In addition to a standard stereographic projection of the planes, a stereographic projection of the directions is needed. Such a projection can be constructed from the angles given in Table I. To provide more information about angles between planes and directions, we have calculated interplanar angles up to (332) and angles between planes and directions up to [332] on an IBM 1620 computer. The angles are differentiated according to permutations of sign and indices. Those doing research on tin single crystals are welcome to request a copy of these tables from the authors.

Jan 1, 1967

By E. S. Wheeler

The rapid increase in the use of monel metal and malleable nickel in the form of sheet, rod and tube has resulted in a similar increase in the demand for these metals in the form of castings. These castings range in size from small valves and pipe fittings weighing a few ounces to large centrifugal pumps, gate valves and marine propellers, some of the last weighing as much as 24,000 lb. A group of such castings is shown in Fig. 1. A large nickel agitator is shown in Fig. 2. Monel metal castings are widely used in accessories for steam power plants and in a variety of chemical plant equipment where the corrosion resistance, high strength and toughness characteristic of this metal render it particularly valuable. Nickel castings find extensive use in the construction of corrosion-resistant apparatus, and are often used in conjunction with wrought nickel sheet and tube in the fabrication of equipment for handling a variety of chemical and food products, particularly dairy products. In response to this demand for castings, numerous foundries have undertaken the production of castings of these metals and have met with varying degrees of success. The successful production of castings of monel metal and nickel requires careful attention to molding practice, proper melting equipment

Jan 1, 1930

By K. E. Manchester, C. B. Sibley

The feasibility of doping silicon to produce device structres by directly implanting impurity atoms has been demonstrated. Both phosphors and boron ions have been successfully implanted in silicon to produce electrical junctions. Junctions as deep as 1.2 p have been produced by phosphorus ions having energies the order of 80 kev. An electromagnetic separator has been used to controllably produce uniform, large-area implantations for evaluation experimentation. Correlations between junclion depths and ion energies huve been obtained. Orientation effects have been observed and it has been found that the (110) direction is the easy direction for implanting. Monitoring of thermal treatments oj implanted substrates by sheet-resistance measurement indicates a very mild thermal anneal removes most of the damage done during the implantation. These indications are further substantiated by reverse-current measurements of j,inctions Produced by implantation. Electrical characteristics of implanted junctions are compared with those of diffused junctions. We have been interi n the interaction of energetic ions in the III-V groups, in particular boron and phosphorus, with single-crystal silicon to produce type conversion for possible device use. A number of investigators, a few of whom are avies, Kornelson,3 and so forth, have reported on penetration of energetic ions into both amorphous and crystalline solids. While most work has been done with ions of the rare gas and alkali metal groups, some work has been reported by ing, erber,' and others6 in which ions of the 111-V groups have been implanted in single-crystal silicon. A large amount of this work has been done with ion energies in the 100-kev to 1.5-Mev range. An excellent review article has been written by caldin. We have concentrated on ion energies which are in the 10 to 80 kev range, with which over 1500 implanted junctions such as the one shown in Fig. 1 have been produced in silicon substrates with both phosphorus and boron ions. Fig. 1 is a 3-deg angle lap in which the n type area produced by 66 kev P is delineated and the junction is 9500A below the surface. EXPERIMENTAL Implantations reported in this paper were made with the ion source adjusted to produce ion currents in the range of 1 to 2 pa with accelerating voltages varied from 10 to 40 kv. When using doubly charged ions this produced 10 to 80 kev ions. This allowed substrate temperatures to remain below 100°C. Sam- ple movement resulted in beam impingement angle variation of 7 deg from the normal to the substrate surface. Substrate resistivities have been varied through the range of 0.001 to 500 ohm-cm and specimens oriented in three directions, (110), (Ill), and (loo), within 12 deg. RESULTS For the purpose of this paper, discussion of results will be limited to phosphorus implantations with mention of results for boron-implanted silicon. Similar results have been obtained for boron and will be reported at a later date. In Figs. 2, 3, and 4 depth penetration is shown

Jan 1, 1967