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By R. S. Montgomery

Laboratory experiments simulating rock drilling were conducted on a number of commercial grades of tungsten carbide in order to determine their wear rates when they are used as inserts in percussive rock drill bits. The test rock was Barre granite and tests were made at conditions similar to those of the carbide buttons near the periphery of a large, down-hole, button bit. In addition, some wear rate measurements were made at a low blow energy. Wear rates of these carbide buttons were an extremely sensitive function of their cobalt contents and hardnesses and were proportional to e-°.57Hup to a hardness of about 91 RA. The point of minimum wear rate, which occurs at about 92 RA, corresponds to the point of maximum compressive strength. Modern percussive rock drill bits have inserts of cemented tungsten carbide on their wear faces. These inserts have drastically reduced bit wear in comparison to that of earlier all steel bits. The most common cemented carbide grade used in percussive rock drill bits contains about ten weight percent cobalt, although grades containing more or less cobalt are also used. Contrary to the case with carbide in metal-cutting tools, alloying materials are rarely used in mining grades. There are a number of designs of rock bits in current use. The most common form is an X bit which has four chisel-form radial wings. The button bit is another important design and one which has been recently developed. This design uses a flat steel face studded with relatively small hemispherically tipped carbide buttons. These types are illustrated in Fig. 1. Studies have been made of the sliding wear of cemented tungsten carbide on rock 1-4 and multiple-impact fracture', 5-6, b~t there has been comparatively little published on the percussive wear of this material although the wear of the impact face is the most important. There is some available data on the rate of dulling of rock bit inserts in actual drilling 7 but no laboratory studies. Sliding wear studies are useful for understanding the wear of coal and mineral cutting tools and gauge wear of percussive drill bits. but the

Jan 1, 1970

By J. Richter, D. Schulze

J. Richter and D. Schulze (Deutschen Akademie der Wissenschafte zu Berlin)—Introduction. In a recent paper R. G. Garlick and H. B. Probst reported on experimental results of investigations of room-temperature slip in zone-melted tungsten single crystals.17 In the paper it was pointed out that slip lines could be detected with an optical microscope only after about 10 pet plastic strain of the crystal. In our investigations we could observe slip lines in tungsten single crystals of defined orientations already with an elongation of 0.02 to 0.03 pet.18"9 Experimental Technique and Results. The tungsten single crystals were produced from 4 to 5 mm sintered rods* as starting material by electron- beam zone melting. With single-zone-pass melting a speed of 0.5 mm per min was used, while three-pass melting could be handled at a speed of 3 mm per min. Crystal axis orientations were located in the shaded area of the stereographic triangle, see Fig. 6. Orientation 1 is located at about 18 deg and orientation 2 at about 5 deg on the great circle from [011] to [ill]. This corresponds approximately to the orientations P and M referred to by Garlick and Probst. Our single crystals had a length of about 70 mm and were profiled solely by electrolytic means, leaving grip ends at both ends of the crystals. Between the latter, a cylindrical crystal of 45 to 50 mm length and about 2.4 mm diam was obtained. The crystals were deformed at room temperature in a commercial tensile-testing machine to obtain a strain of 0.02 to 5 pet. The average strain rate e = eP/t for all tensile tests amounted to approximately 10 -6 to 10-5 per sec, with ep representing plastic strain and t the duration of applied stress. In Fig. 7 a crystal is shown elongated by 0.03 pet. The picture was obtained by means of an optical microscope. Figs. 8 and 9 give electron-microscopic pictures of slip lines of crystals elongated by 0.07 and 1.1 pet, respectively. For crystals with the orientation 1, see Fig. 6, only the two main slip systems (101)[111] and (110)[111] were found. With the crystals of group 2 the two main slip systems are again evident, with

Jan 1, 1965

By Douglas Bunting

With the gradual exhaustion of the upper veins in the anthracite coal-fields, the problem of mining at greater depths acquires increasing importance and demands the consideration .of a number of important factors, one of which is the greater earth-pressure and the consequent necessity of stronger support for the roof. Under the pillar-and-chamber system, almost exclusively followed in the Northen anthracite-field, the highest economy in mining is generally secured by leaving, on first mining, pillars only sufficient to support safely the overlying strata. As to the necessary size of such pillars, the opinions of mining experts are widely divergent. In establishing the width of chambers and pillars, the thickness of vein and its depth below the surface have received little consideration. For instance, it has been quite usual to work both overlying and underlying veins with the same width of chambers and pillars, when the lower vein was two and one-half times as thick, and twice as far below the surface, as the upper. In view of the generally-accepted theory that the crushing-strength of coal-pillars of the same base-area becomes less with increased height, it is probable, in this instance at least, that the moat economical mining has not been secured. This question of adequate pillar-support is economically less important down to about 800 ft. than at greater depths; and it is with reference to mining at these greater depths that the study of the subject here presented has been prompted. The necessity of leaving larger pillars, involving greater mining-costs per ton and also smaller yields per acre, is one of the troubles of deep working. To mine without leaving adequate pillar-supports will result, sooner or later, in a squeeze. Limited areas, it is true, have been mined at certain widths of

Jan 1, 1912

By Hallan N. Marsh, Bruce H. Robinson

It is now generally recognized that to secure the greatest ultimate recovery of petroleum from a field it is necessary to maintain at all times the lowest possible ratio of gas to oil production. The numerous ways of securing low ratios are not so generally understood or practiced. To many operators, reduction of gas-oil ratio simply means "beaning back" wells, with resultant reduced production rate. This postponement of production is often considered and spoken of as "lost" production, with the result that control of gas-oil ratio is in disfavor with some operators. Various methods are herein discussed by which gas-oil ratio may be reduced, some of which invoLve no curtailment of current production, while others are accompanied by an actual increase of daily production. It is further shown that in cases where rate of production is reduced to conserve gas, the indicated ultimate recovery is generally increased. Principles involved are discussed, and conclusions are illustrated by data from the operation of wells. General Principles The rate and ratio in which oil and gas enter a well are solely dependent, so far as the operation of that well is concerned, upon the pressures maintained in the well opposite the producing strata at various times and at various depths. The method of getting the oil out of the hole, whether by natural flow, gas-lift, or pumping, has no effect upon either rate of production or ultimate recovery except through its effect upon pressures. Oil apparently enters wells according to some such equation as the following: R = KC(Pf - Pw)n Where R = rate of production. K = well coefficient, depending upon thickness of sand, and size and number of pores in the sand. C = fluid coefficient, depending upon viscosity, surface tension, etc.

Jan 1, 1929

By CHARLES DORRANGE

INTRODUCTION. CULM is a general term used in the anthracite regions for many years to denote a mixture of coal, bony coal and impurities which is sent to the refuse-banks. Thus, 35 years ago culm contained the pea and buckwheat sizes of anthracite; but to-day, and as mentioned in this paper, culm is used specifically to denote the material which passes through the smallest screen in the anthracite-breaker. The smallest size of commercial anthracite is known as No. 3 buckwheat, barley, or bird's-eye coal, and is ordinarily made through a round-punched plate having openings 3/16 in. in diameter, and over a round-punched plate with opening 3/32 in. or 1/16 in. in diameter. Thus culm will consist of coal, bony coal, slate, gravel, iron pyrite, etc., ranging in size from ? 3/32 in. down to dust. Other local terms for culm are " slush," " silt," and " dirt." The first experiments towards the utilization of anthracite culm by briquetting, and the first briquetting-work done in this country, were in 1872 at Port Richmond Piers, Philadelphia, Pa., by E. F., Loiseau.1 Clay was used as a binder and the finished briquette was water-proofed with shellac, etc. Excessive cost was given as the reason for discontinuing work at this plant. The Delaware k Hudson Co., in 1876, built a plant at Rondout, N. Y., which operated until 1880. Gas-tar was used as a binder, and anthracite screenings were briquetted for engine fuel. Excessive cost, poor results in firing, and the tendency of the fuel to cut the boiler-flues were given as the reasons for discontinuing the manufacture. The next plant was built by E. F. Loiseau about 1878, at Nesquehoning, Pa., near the No. 1 or Nesquehoning colliery

Sep 1, 1911

By Oliver Bololes

UNDER the able leadership of Samuel H. Dolbear, the Committee on Nonmetallic Minerals furnished a program of sixteen papers comprising three sessions. An outstanding accomplishment in technology presented at the first session by Benjamin L. Miller and C. H. Breerwood is the application of flotation to the purification of limestone used in cement manufacture. In place of selective quarrying to provide high-grade raw material, the quarry-run stone is pulverized and treated in froth flotation cells for removal of free silica and mica. Some advantages are cheaper quarrying, more complete utilization of quarry rock, avoidance of purchasing high calcium stone, lower fuel cost and improvement in the finished cement. Paul M. Tyler presented the general subject of milling methods as applied to nonmetal lies. He pointed out the importance of some of the more recent refinements in ore dressing, and urged the need of a wider appreciation of their possibilities. The gypsum industry of Canada was described by L. H. Cole. Crystal growth during the setting process was illustrated by moving pictures. The Coastal Plain and interior salt

Jan 1, 1935

THE opening session was held on Tuesday evening, February 17th, in the house of the American Society of Civil Engineers. The President of the Institute, Mr. E. B. Coxe, after a few introductory remarks, congratulating the members on the general prosperity in all the branches of the professions and manufactures represented by the Institute, called on Mr. E. F. Loiseau, of Philadelphia, for the first paper, On the Successful Manufacture of Compressed Fuel at Port Richmond, Philadelphia. Professor Prime called attention to the fact that the work of the United States Testing Board had been left unfinished at a point when valuable results had just been reached, and offered the following resolutions: WHEREAS, The American Institute of Mining Engineers has seen with regret that the work of the United States Testing Board has been suspended through the lack of an appropriation by Congress, which appropriation dues not seem likely to be renewed, and WHEREAS, It seems most important to the vital interests of our iron and steel manufactures that the experiments commenced by the United States Testing Board should be carried to successful completion ; Resolved, That a committee of three be appointed, to act with a like, committee to he appointed by the American Society of Civil Engineers, to carry out to completion the work commenced by the United States Testing Board. Resolved, That the American Society of Civil Engineers be requested to cooperate with this society by the appointment of a like committee. Resolved, That the committee have authority to request, in the name of the American Institute of Mining Engineers, contributions to a fund to be devoted to the completion of the experiments aforesaid. Resolved, That the Council of this Institute be authorized, whenever requested by the committee so appointed, to petition Congress for the free use of the testing machine at the United States Arsenal at Watertown. Resolved, That a committee be appointed by the President, to select the afore-said committee of experts. Resolved, That the President of the Institute have authority to fill any vacancies which may occur in the committee. The resolutions were unanimously adopted, and President Coxe appointed the following committee in accordance with the resolutions : Messrs. A. L. Holley, James Park, Jr., and J. F. Holloway. The President also appointed Messrs. Heinrich, Mickley, and Spils-

Jan 1, 1880

By N. A. Gjostein

From their study of the anisotropy of grain boundary mobility in aluminum, the authors conclude that tilt boundaries have a higher mobility than twist boundaries because the atomic misfit at the pure-twist boundary is relatively small compared to the misfit at a tilt boundary for a given amount of misorientation. If this is true, then one would expect a twist boundary to have a lower grain boundary energy than the corresponding tilt boundary. Fig. 6, taken from the work of Gjostein and Rhines,10 shows that this is indeed the case for [001]-cu tilt and twist boundaries in the high-angle region, thus lending support to the authors' conclusion.

Jan 1, 1968

By G. A. Vissac

MOISTURE in coal must be considered as an impurity, just the same as ash, from the standpoint of utilization of the coal. Being incombustible, it reduces directly the heating value of the coal, and in addition absorbs heat for its evaporation. Its presence means useless expenditures in handling and transportation. In coke plants, extra moisture reduces capacity and may cause damage to brick work and equipment. Accordingly, the removal of extra moisture can be considered just as important as the removal of other impurities, such as ashes, in the modern coal preparation plant. Moisture, which can be removed by heating the coal up to a temperature of 100°C, may be retained in various forms: 1. As a film, on the surface of each coal particle, and in the interstices between particles, retained by capillary forces. 2. Or "occluded" inside the coal particles. This occluded moisture may be either free moisture (as in a sponge), or hygroscopic moisture which varies with atmospheric conditions, (also called "regain").

Jan 1, 1949

By W. S. Landis

WHEN dealing with a new reagent, one is concerned with three principal factors: available supply, cost, and results. The atmosphere contains an inexhaustible supply of oxygen mechanically mixed with nitrogen (omitting rare gases and minor impurities) in the proportions of one volume of oxygen to four volumes of nitrogen. (All figures are based on slide-rule precision and minor impurities are neglected.) Expressed in terms of weight, 1 ton of oxygen represents a volume of 22,500 cu. ft. and is contained in a volume of 112,000 cu. ft. of air. Water, also an inexhaustible supply, is a chemical compound containing 89 per cent. oxygen and, 11 per cent. hydrogen. Of the hundreds of schemes proposed for the enriching of air or separation of oxygen, nothing of value has yet appeared. From the standpoint of mechanical separation, liquefaction followed by rectification is the only process that has been developed to a really commercial stage. Theoretically, it should be a .simple matter to separate the mechanical mixture of nitrogen and oxygen; but fractionation can be performed only by converting to the liquid phase and this phase can be obtained only at lower than critical temperatures. The problem, therefore, is not so simple and the cost of the actual operation bears no relationship to the theoretical simplicity of the process. The largest single unit of the required apparatus so far placed in commercial use will handle only 60,000 cu. ft. of air per hour through a compressor which operates at a little over 250 lb. per sq. in. After this apparatus has operated continuously for 14 to 18 days it must be shut down for 6 to 8 hr. to be thawed out, have accumulated impurities removed and again cooled down for production. The cost of such a unit erected in batteries, with necessary spares for maintaining production, and including prime movers, hoisting and all auxiliary equipment, will be about $125,000. To produce one ton of oxygen per hour requires two operating machines of this size; and if the production is to be absolutely continuous a spare unit must be provided. To operate a plant of two units requires 10 or 11 men, excluding boiler attendants, if steam is generated in the plant.

Jan 11, 1924

By R. E. Hummel, J. W. Koger

IT is generally accepted that the martensitic start temperature (Ms) can be determined by resistivity measurements and is that temperature where the resistivity vs temperature curve on cooling first deviates from a straight line.1-4 Both Titchener and ever' and pops5 have used resistivity measurements to follow the martensitic transformation in b1 Cu-Zn and ternary Cu-Zn-based b-phase alloys, respectively. Actually because of the nature of their measurements the temperature of minimum resistivity (M) was used by these authors to determine "Ms" . Also, due to experimental difficulties in detecting M, with resistivity measurements, Pops and Massalski 8 determined M, by optical microscopy. The present communication is concerned with high-precision, low-temperature resistivity measurements which reveal a definite M, temperature which differs from the temperature of minimum resistivity (M). It is also shown that M is merely the result of the geometry of the percent-transformation curve and the temperature coefficient of resistivity of the alloy. In other words, it will be demonstrated that M has no apparent significance (except that it denotes a temperature at which some percent of martensite can be detected in a given alloy). Alloy specimens were made by melting 99.999 pct Cu and 99.9999 pct Zn in sealed and evacuated quartz tubes and homogenizing them at 601PC for 300 hr. After the alloy was cold-rolled into foils suitable for resistivity measurements, it was quenched in ice water from 871PC. The chemical analysis showed a zinc content of 38.8 wt pct. The cooling rate during the martensite transformation was 1°C per min and was controlled with a thermistor. Electrical resistivity measurements were made using a K-3 type potentiometer; the reproducibility of the resistivity values was better than 0.03 pct. Temperatures were measured with a thermocouple to an accuracy of better than 0.2° C. Fig. 1 shows the resistivity vs temperature curves of the martensitic transformation in B1 Cu-Zn for both cooling and heating. The starting point of the martensitic transformation (M,) was taken as that

Jan 1, 1968

By C. D. Haynes, S. C. Gambrell

The practice of roof bolting in WORLD-WIDE mining activities is very well-known, having been used extensively for over 50 years. The theory of roof bolting, however, is extremely complicated, and only recently have investigators attempted to explain the theory. Various means of stress analysis have been utilized in rock mechanics, most of which reduce rock to an isotropic, homogeneous medium that can be easily analyzed. One of the indirect research methods is the photo-elastic technique, the theory of which is widely known and needs no elaboration. This technique has been used extensively to examine the state of stress around underground openings of various shapes in certain types of strata, and under various loading configurations.'-" In-Situ Mine Roof Trusses The photoelastic technique was employed here to evaluate the state of stress above a mine opening where support is provided by the in-situ mine roof truss. This support configuration, shown in Fig. 1, has gained popularity in recent years, particularly in mines with bad roof conditions." To the authors' knowledge, no scientific determination has been made of the advantages roof trusses may offer over conventional bolting configurations comparable to roof trusses. Ordinary mine roofs usually sag or bulge downward soon after mining. Normally, after some movement the roof begins to stabilize, but the face of this bulging mine rock is usually in tension and will almost always fail unless supported. Because rock fails easily in tension, it is desirable to "preload" the roof, that is, to impress a compressive force on the mine roof to prevent bulging and subsequent tensile failure. Ordinary rock bolting installations, particularly if the bolting is perpendicular to the mine roof plane, do not produce a preloading effect. Although bolting installations squeeze the strata together and produce a beam effect desirable for support, they do not have the advantage of actual uplift. They pull down at the anchorage point with a force equal to the bolt tension which sometimes causes a separation in the plane of the anchorage detrimental to roof strength. In-situ mine roof trusses require the installation of steel tension rods in the roof of the mine much the same as conventional roof bolts, except that the rods are arranged to produce a stress pattern above the upper surface of the opening similar to that of a prestressed beam. The roof rock acts to transmit the compression force. The simplest form of truss consists of two steel rods anchored to the back of holes drilled at an angle of approximately 45 over the mine pillars. These rods are collared near the middle of the room, and the lower ends of the rods are connected by tie rods and turn-buckles. Used in this manner, a small-diameter steel rod can provide essentially the same support as a wide-flange steel beam. By tightening the turnbuckles, an uplift on the roof can be produced. Objective of the Investigation The objective of this investigation was to determine qualitatively the state of stress that exists above a mine roof after the installation of the in-situ mine roof truss vs. that of two angle roof bolts, hereafter referred to as "roof bolts," drilled and placed in the same configuration, that is, 45" above each pillar and connected together in the middle of the room by a bearing member such as a steel beam. Each state of stress was to be identified, insofar as possible, as compression or tension above the mine opening. Model Construction A photoelastic model of a mine opening was coil-structed from -in. thick PLM-4B birefringent plastic and was machined to specification shown in Fig. 2. The dimensions of the opening were chosen to simulate a width-to-depth ratio of 3 to 1. Two % -in. holes were drilled at 45" angles, as shown, to provide for the loading devices. After construction, the model was annealed at 240°F to remove stresses produced during machining.

Jan 1, 1971

By Ling Yang, John Henderson

Self-diffusion coefficients of copper in molten copper have been measured by the capillary reservoir method in the temperature range 1140o to 1260°C. The results can be represented by the equation D = [(1.46 * 0.01) x 10-3) exp [(-9710 * 710)/RT] cm2/sec. The energy of activation agrees within the limit of experimental uncertainty with that for viscous flow. The relationship between the diffusivity and coefficient of viscosity is best described by the equation D = kT/4pnr cm2/sec. MEASUREMENT was made of the self-diffusion coefficient of copper in molten copper in the temperature range 1413º to 1533ºK, using the capillary reservoir technique and CU64 as the radioactive tracer.The procedures for filling the capillaries, making the diffusion run and evaluating Dcu from the counting results were the same as described previously.1,2 All experimental operations involving the melt were carried out in a purified argon atmosphere. A graphite crucible, enclosed in a McDanel tube, was used as a container for the melt because of its satisfactory nature as a refractory material and the low solubility of carbon in copper. Graphite was also used for the capillary material. A McDanel thermocouple sheath, to which graphite radiation shields were affixed, was used to hold the capillaries. By moving this sheath through a rubber seal at the top of the McDanel tube, the capillaries could be lowered into or raised out of the melt. A Globar furnace with a constant temperature zone (± 2°C) of 2 in. was used to heat the assembly. The temperature of the furnace was the equilibrium value corresponding to a given setting of the transformer. Temperature was measured with a Pt-10 pct Rh/Pt thermocouple and varied during a run

Jan 1, 1962

By R. W. Vieth, S. A. Bradford

THE orientations of tetragonal tin crystals are commonly examined by either the transmission Laue method or the back-reflection Laue method. The predominant planes and zone axes of the pattern are plotted on a Wulff net and indexed by measuring the angles between planes and directions. The problem of identifying the Laue spots has been approached in several different ways. Nicholas 1 tabulated interplanar angles for ten planes but did not relate the angles to permutation of indices or sign. A table of angles between adjacent planes and of angles between adjacent zones was published by Chandrasekhar and veal.' These tables are very helpful, provided the film shows all the low-order zones that occur within about 20 deg of each other. Frounfelker and Hirthe's compilation3 of angles between the (001) plane and twenty-nine other planes is useful for the indexing, only if the (001) spot can be found on the film. For all but the simplest orientations, however, more information is needed to index the diffraction spots. Standard stereographic projections, such as those published by Bicelli, 4 provide part of the information required. By their nature, these projections show the positions of only a few zone axes. In the tetragonal system many low-order zone axes are not normal to the planes having the same indices. Consequently, planes and directions can have entirely different positions on a stereographic projection. For example, the [011] zone axis is 33 deg from the normal to the (011) plane. The crystallographic orientation usually has to be deduced from a combination of the predominant zone axes and a few low-order planes that appear on the film. In addition to a standard stereographic projection of the planes, a stereographic projection of the directions is needed. Such a projection can be constructed from the angles given in Table I. To provide more information about angles between planes and directions, we have calculated interplanar angles up to (332) and angles between planes and directions up to [332] on an IBM 1620 computer. The angles are differentiated according to permutations of sign and indices. Those doing research on tin single crystals are welcome to request a copy of these tables from the authors.

Jan 1, 1967

By D. L., Hayes

THE concentration of zinc ore in Wisconsin is a comparatively simple process, although it presents problems that must be overcome in an efficient manner in such a way that installation and operating costs are low. As the ore deposits are small, the first cost of the concentrating plant must be low; while the low margin of profit makes it necessary to have the minimum operating costs. The original mills were copied from those of the Joplin district, as most of them were built and operated by Joplin millmen. These served the purpose well; they made a clean concentrate, which was the chief requirement at that time, as most 'of the mines were' considerably 'richer than the average at the present time, and wages and supplies were also considerably lower. ' The apparatus used at present has changed very little in principle. . The grizzly opening has gradually been increased to 12 in. and sometimes no grizzly 'is used. The crusher, gradually grew in size, the largest crusher has -an opening of about 24 by 13 in. and a 7/8-in. throw on the. eccentric shaft.

Jan 1, 1921

By E. S. Wheeler

The rapid increase in the use of monel metal and malleable nickel in the form of sheet, rod and tube has resulted in a similar increase in the demand for these metals in the form of castings. These castings range in size from small valves and pipe fittings weighing a few ounces to large centrifugal pumps, gate valves and marine propellers, some of the last weighing as much as 24,000 lb. A group of such castings is shown in Fig. 1. A large nickel agitator is shown in Fig. 2. Monel metal castings are widely used in accessories for steam power plants and in a variety of chemical plant equipment where the corrosion resistance, high strength and toughness characteristic of this metal render it particularly valuable. Nickel castings find extensive use in the construction of corrosion-resistant apparatus, and are often used in conjunction with wrought nickel sheet and tube in the fabrication of equipment for handling a variety of chemical and food products, particularly dairy products. In response to this demand for castings, numerous foundries have undertaken the production of castings of these metals and have met with varying degrees of success. The successful production of castings of monel metal and nickel requires careful attention to molding practice, proper melting equipment

Jan 1, 1930

By Richard Akerman

At the International Sessions of the Iron and Steel Institute of Great Britain, the American Institute of Mining Engineers and the Verein Deutscher EisenhUttenleute, held in Allegheny City, Pa., in October, 1890, Sir James Kitson, then President of the Iron and Steel Institute, presented an account by Sir Henry Bessemer of the origin of the process which bears his name.? The paper graplhically told how, after the first successes immediately following the first reports given at Cheltenham of the new process, there rapidly succceded such obstacles and difficulties in its practical application, that the whole matter was nearly abandoned in 1858. Suddenly, however, the situation changed, so that at length it became possible

Jan 1, 1894

By R. W. Raymond

The idea of obtaining light from incandescent solids is not new; nor is it. new to make such bodies incandescent by holding them in a heating flame. But the successful combination of the right substance and form of the body to be heated with the right kind of flame and the right means of adjustment, has not, to my knowledge, been accomplished heretofore; and it seems to me that the matergas incandescent light of Mr. Otto Fahnehjelm of Sweden, in which these objects appear to have been secured, is destined to become both famous and useful. The first fact upon which this invention is based, is the intense

Jan 1, 1885

By K. E. Manchester, C. B. Sibley

The feasibility of doping silicon to produce device structres by directly implanting impurity atoms has been demonstrated. Both phosphors and boron ions have been successfully implanted in silicon to produce electrical junctions. Junctions as deep as 1.2 p have been produced by phosphorus ions having energies the order of 80 kev. An electromagnetic separator has been used to controllably produce uniform, large-area implantations for evaluation experimentation. Correlations between junclion depths and ion energies huve been obtained. Orientation effects have been observed and it has been found that the (110) direction is the easy direction for implanting. Monitoring of thermal treatments oj implanted substrates by sheet-resistance measurement indicates a very mild thermal anneal removes most of the damage done during the implantation. These indications are further substantiated by reverse-current measurements of j,inctions Produced by implantation. Electrical characteristics of implanted junctions are compared with those of diffused junctions. We have been interi n the interaction of energetic ions in the III-V groups, in particular boron and phosphorus, with single-crystal silicon to produce type conversion for possible device use. A number of investigators, a few of whom are avies, Kornelson,3 and so forth, have reported on penetration of energetic ions into both amorphous and crystalline solids. While most work has been done with ions of the rare gas and alkali metal groups, some work has been reported by ing, erber,' and others6 in which ions of the 111-V groups have been implanted in single-crystal silicon. A large amount of this work has been done with ion energies in the 100-kev to 1.5-Mev range. An excellent review article has been written by caldin. We have concentrated on ion energies which are in the 10 to 80 kev range, with which over 1500 implanted junctions such as the one shown in Fig. 1 have been produced in silicon substrates with both phosphorus and boron ions. Fig. 1 is a 3-deg angle lap in which the n type area produced by 66 kev P is delineated and the junction is 9500A below the surface. EXPERIMENTAL Implantations reported in this paper were made with the ion source adjusted to produce ion currents in the range of 1 to 2 pa with accelerating voltages varied from 10 to 40 kv. When using doubly charged ions this produced 10 to 80 kev ions. This allowed substrate temperatures to remain below 100°C. Sam- ple movement resulted in beam impingement angle variation of 7 deg from the normal to the substrate surface. Substrate resistivities have been varied through the range of 0.001 to 500 ohm-cm and specimens oriented in three directions, (110), (Ill), and (loo), within 12 deg. RESULTS For the purpose of this paper, discussion of results will be limited to phosphorus implantations with mention of results for boron-implanted silicon. Similar results have been obtained for boron and will be reported at a later date. In Figs. 2, 3, and 4 depth penetration is shown

Jan 1, 1967