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By Billy L. Crowder, John M. Fairfield

The implantation of B+ , P+, and As&apos; into silicon has been studied with the purpose of making shallow p-n junctions. The influence of such parameters as 1) ion energy, 2) target orientation and temperature, 3) total dose, and 4) annealing schedule was investigated. An energy range of 70 to 300 kev was used for boron and phosphorus implants and up to 500 kev for arsenic. It is found that the experimental projected range agrees well with theory and that shallow junction depths can be made reproducibly. ION implantation has received much attention recently as a technique for doping semiconductors. Specifically, it has the potential of supplementing or replacing the diffusion process as a method for making p-n junctions. In a few specific cases it has been used successfully to make semiconductor junction devices. Potential advantages of ion implantation doping over diffusion techniques are: 1) It affords greater control of shallow junction depths (< 0.2 µ) while maintaining high peak concentrations. This is particularly important for high-speed switching devices, since lower junction capacitances and resistances can be achieved. 2) More precise registration of small planar structures can be realized if proper masking procedures are employed. This advantage is especially useful in the design of high-density integrated circuits. It has been used to advantage in FET fabrication since the edge of the source or drain can be aligned precisely at the edge of the gate electrode.&apos; 3) Ion implanatation permits lower temperatures than diffusion techniques. This factor alleviates the problem of compatibility of diffusivities often encountered when designing multiple-junction structures. Also, the lower temperatures create fewer thermal defects and dislocations, which may account for the high efficiency of some ion-implanted solar cells.2 4) Impurity profiles can be more easily tailored to resemble ideal distributions. Successful exploitation of the potential advantages of ion implantation techniques will depend on increased knowledge and understanding of the subject. The factors likely to be influential in determining impurity distribution profiles in ion-implanted single-crystal targets have been reviewed by J. F. Gibbons.3 In addition to the mass and energy of the implanted ion, the total dose, target orientation, and target temperature are important parameters. The annealing temperature required for removing lattice damage and incorporating the implanted species on an electrically active site is very important. This paper describes an investigation of some of these factors. Implants of boron, phosphorus, and arsenic into silicon have been studied. Energy ranges of 50 to 300 kev were used for boron and phosphorus and up to 500 kev for arsenic. In addition to the implantation energy, the effects of total dose, target temperature, and post implant anneal have been investigated. EXPERIMENTAL PROCEDURE The implantation targets were silicon wafers cut from Czochralski-grown crystals, lapped, and chemically polished. The orientations were (111), (110). and (100) with misorientations of up to 7 deg from the principal axis. For this study, accurate target alignment (i.e., within 0.1 deg) was not available and quoted misorientation values should be regarded as approximate . The implantation equipment consisted of an ion source, a 300-kev linear accelerator tube, an electromagnetic separator, and the associated target supporting and beam focusing assemblies. The ion source was a simple oscillating electron type source,4 which has been described elsewhere.5 The gaseous compounds BF3, PF5, and AsH3 were used as ion sources for B+, P+, As+, and AS+&apos;. Analyzed current levels of up to 20 pamp could be obtained; however, for this investigation target current levels of 1-3 µ amp were usually employed. The analyzed ion beam was collimated through a double slit (1.4 x 0.4 cm) and swept perpendicularly to the long axis of the slit such that an area of about 2 sq cm on each target was covered. Dosages of around 1015 cm-2 were normally employed, but smaller amounts were also used for comparison. A uniform flux density over the bombarded area was assured by the continuous use of profile monitors similar to those described by Wegner and Feigenbaum.6 Post-implant annealing was accomplished in an argon atmosphere in a temperature range of 600" to 950°C. It was not part of the purpose of this investigation to study the annealing kinetics; however, some isochronal and isothermal anneal experiments were conducted to determine the time and temperature necessary to render a reasonably high portion of the implanted ions electrically active (i.e., higher than 50 pct). Post-implant anneal temperatures of around 900° and 600°C were required for boron, and arsenic and phosphorus implants, respectively. Arsenic and phosphorus implants increased in conductivity rather abruptly at the proper anneal temperature of the isochronal curve, but boron increased more gradually over a wider range. Isothermal anneal curves were reasonably flat after 10 min, so an anneal time of 1/2 hr was used for the experimental results described below. The profiling techniques were: 1) neutron activation analysis, 2) differential sheet resistance,7 and 3) junction staining.8 The differential sheet resistance technique is commonly employed in this type of study. Its principal disadvantage is the uncertainty of the ef-

Jan 1, 1970

By V. I. Purcell, R. E. Snow, S. C. Sun

FATTY acids have been used as standard collectors for floating the matrix1-8 but not the leached zone phosphate ores. After a series of investigations, Davenport9 and Tarbutton10 concluded that the Florida leached zone ores tested were unamenable to fatty acid flotation and must be upgraded by floating the siliceous gangue with Armac-T as collector. The cationic flotation was estimated11 to cost almost ten times as much as a fatty acid process that would ideally give the same flotation grades and recoveries of phosphates. Mineralization: Extensive deposits of leached zone aluminiferous phosphate occur in The ore sample used for this work was obtained from the Virginia-Carolina Chemical Corp., Clear Springs area, Florida. The ore is a potential source of uranium and aluminum as well as phosphorus. Since the uranium and the recoverable aluminum are contained in some of the phosphate minerals, an upgrading of phosphate results in a corresponding enrichment of both uranium and aluminum. The phosphate minerals in the ore are primarily pseudo- wavellite, millisite, and carbonate fluorapatite, with a minor amount of wavellite. Quartz and clay are the common gangue minerals, quartz being pre- dominant. Others present in small amounts are ilmenite, hydrated iron oxides, staurolite, monazite, and zircon.

Jan 1, 1957

THE Institute conducts jointly with the American Society of Civil Engineers, American Society of Mechanical Engineers and American Institute of Electrical Engineers, certain activities as listed below, and is joint owner with them of certain properties situated at 29 West 39th Street in New York City United Engineering Trustees, Inc. When Mr Carnegie made his gift, "for the erection of a suitable union home" for the engineering societies, United Engineering Trustees, Inc (then United Engineering Society) was chartered under Chapter 703, Laws of the State of New York, 1904, for "the advancement of the engineering arts and sciences in all their branches, and to maintain a free public engineering library" The Corporation was further empowered to acquire real and personal property and to use, maintain and occupy it, with the provision that any building erected by the Corporation shall be used perpetually as a meeting place and headquarters for the Founder Societies Thus the Carnegie gift realized the ideal of bringing the engineering societies together under one roof, and the Corporation through its members nominated in equal numbers by the four Founder Societies had the necessary authority to act for the Founder Societies in their joint interests in owning and operating for them not only Engineering Societies Building, but in the course of time, Engineering Societies Library, and

Jan 1, 1952

By Arnulf Muan, Carlos Landolt

Equilibria involving Cu-Pt alloys, copper oxides, and atmospheres of known ox2gen pressures have been determined at 1000&apos; and 1200 C. The data obtained have been used to calculate activity-composition relations in the alloys. A moderate negative deviation from ideality is found. At high copper concentrations, the results of the present study are in good agreement with those of previous investigators, whereas at low copper concentrations the activities obtained in this investigation are slightly higher than those reported previously. The present study is part of a research program dealing with the determination of phase relations and thermodynamic properties of copper-containing systems at high temperatures. The information available for such systems is very scanty, particularly for copper oxides and their combinations with other oxide components. Platinum is commonly used as a container in studies of oxide equilibria. To evaluate quantitatively the extent of reaction between the oxide and the container, a knowledge of activity-composition relations in Cu-Pt alloys is necessary. Such data are not available for Cu-Pt alloys in the temperature range of particular interest in the present research program, and particularly for alloys low in copper. Studies of various aspects of the systems Cu-Pt and Cu-0 have been reported in previous literature. The system Cu-Pt is known1 to form a continuous solid-solution series above 812.C, whereas ordered phases are present in certain composition ranges at lower temperatures. Thermodynamic data for the system have been reviewed by Hultgren et al.,&apos; who presented free energies of mixing at 65Oo C, mainly derived from electromotive force cell measurements by Weibke and Matthes.3 Enthalpies of mixing at 640°C have been obtained by Oriani and Murphy4 with liquid tin calorime-try. Their results differ considerably from those derived from the temperature dependence of the data of Weibke and Matthes. Thermodynamic data for the disordered alloys have been obtained by Assayag,5 and more recently by Schmahl and Minzl,6 by Myles and Darby,7 and by McCormack, Myers, and Saxer.8 The two latter sets of data7&apos;&apos; became available after the present study was completed. In the system Cu-0+ two oxides are stable at high temperatures, CuO and CuzO+ each having only minor deviations from stoichiometry. Equilibria in the liquidus temperature region of the system Cu2O-CuO have been studied by Roberts and systemsmyth,9&apos;10CuzO-CuO by Vogel and ocher,I1 by Osterwald,12 and recently the the present authors.13 The system is of the eutectic type with a eutectic temperature of 1083.C The composition of the eutectic liquid corresponds to Xcu0 = °.44, and the oxygen pressure of the coexisting gas phase is Po2 = 0.55 atm.13 Equilibrium oxygen pressures for coexistence of solid CuO and solid Cu2O have been determined by Schmahl and Muller,l4 by Gadalla, Ford, and white,l5 by Bidwell,16 and recently by the present authors.13 There is reasonably good agreement among the various sets of data. Free energies of formation of Cu2O(s) from the elements have been derived by Tretyakov,17 by Bidwell,16 by Kiukkola and wagner,18 by Pal&apos;guev and Neuimin," and by Steele and Alcock,20 There is particularly good agreement among the latter three1&apos;-20 sets of data. THEORETICAL BASIS Consider a subsolidus isothermal section of the system Cu-Pt-0, as shown in Fig. 1. Two phase as-

Jan 1, 1970

By D. Atkinson, C. Bodsworth, I. M. Davidson

A geometric model of interstitial solid solutions, which has been used previously as a basis for the prediction of carbon activities in Fe-C austenite, is shown to serve also for the calculation of nitrogen activities in Fe-N austenite. The model has been developed to enable predictions to be made of the activities of an interstitial element in the presence of two host atom species. The activities calculated via the model are shown to be in satisfactory agreement with the measured values in the austenite phase for carbon in Fe-C-Co, Fe-C-Cr, Fe-C-Ni, Fe-C-~n, Fe-C-Si, and Fe-C-V alloys and for nitrogen in Fe-N-Ni alloys. The effect of the second substitu-tional solute on the logarithm of the activity of the interstitial element is expressed as the product of a constant mad the atomic concentration of that solute. The constants so derived we related to the thermo-dynamic interaction coefficients which describe the effect on the activity coefficient of carbon of an added solute element. In recent years the thermodynamic activities of carbon and nitrogen in the single-phase austenite field have been determined for iron binary alloys and for several iron-base ternary alloys. In order to extend the use of these measurements, it is desirable to be able to predict with reasonable accuracy the activities of the interstitials at compositions and temperatures other than those which have been measured experimentally. In all the systems studied to date, the interstitial elements do not conform to ideal behavior. Hence, the available data cannot be extrapolated or interpolated using the simple thermodynamic concepts of solutions. Several models have, therefore, been formulated for the purpose of predicting the activity of an interstitial element in the presence of one species of host atom. These models can be divided into the geometric1"5 and energetic6-&apos; types. The former group is based on the assumption that at low concentrations the activity of the interstitial species is determined by a composition-dependent configurational entropy term and an excess free-energy term which is temperature-dependent but independent of composition. The purpose of this paper is to show that the treatment, based on a geometric model, can be extended to enable predictions to be made of interstitial activities in the presence of two substitutional host atom species. THE CONFIGURATIONAL ENTROPY OF MIXING ICaufman5 has shown that the configurational entropy, S,, for a binary solution comprising of a host atom species, A, and an interstitial species, I, can be expressed as: where NI is the atom fraction of the interstitial species, R is the gas constant, and (2 - 1) is the number of interstitial sites excluded from occupancy by the strain field around each added interstitial atom. The number of interstitial sites per host atom, p, is unityg for the fcc austenite solutions considered here. The configurational entropy of mixing for a ternary solution comprising two substitutional atom species, A and B, and one interstitial species, I, can be derived similarly. Let the number of atoms per mole of each of these species in the solution be represented by «a, ng, and nI. From geometric considerations, it is improbable that the addition of a few atom percent of a second host atom species will change the type of sites (i.e., octahedral) in which the interstitial atom can be accommodated in the austenite lattice. At higher concentrations (determined largely by the relative atomic radii of the atomic species present and any tendency to nonrandom occupancy of the host lattice sites) other types of interstitial sites may become energetically favorable. Restricting consideration to compositions below this limit, for 1 = 1 the number of suitable interstitial sites is given by (n + nB). However, if each interstitial atom excludes from occupancy (Z - 1) additional sites, the total number of sites available for occupation is reduced to (n + ng)/Z. The number of vacant interstitial sites is given by: The total number of recognizable permutations of the atoms must include the recognizable, different configurations of the A and B atoms on the host lattice. Assuming that these arrangements are purely random, and are not affected by the presence of the interstitial species, the total number of recognizable permutations in the ternary alloy is given by: The configurational entropy is obtained by expanding, using Stirling&apos;s approximation, and collecting like items, as:

Jan 1, 1969

Section 67 Department of Conservation and Development, State of New Jersey, State House Annex, Trenton, N. J. H B Kummel, State Geologist For lists of publications, maps and geologic folios, address the above. Where price of postage is noted, in the following list of available publications on geology, the postage is only to New Jersey and

Jan 1, 1933

President MRS. THOMAS T. READ 9 Windmill Lane Scarsdale, N. T. First Vice-President MRS. FELIX E. WORMSER Acorn Lane Larchmout, N. T. Second Vice President MRS. W. SPROTT BOYD The Carlyle, Madison Ave. and 76th Street New York, N. Y. Third Vice-President MRS. LOREN W. KEMP El Chico, Plainfield Avenue Metuchen, N. J.

Jan 1, 1944

[A. B. Cummins, President James C. Gray, President-Elect J. W. Woomer, Past President C. E. Lawall, Eastern Regional Vice-President Donald W. Scott, Central Regional Vice-President H. C. Weed, Western Regional Vice-President Nathaniel Arbiter, Treasurer John Cameron Fox, Secretary AIME 29 W. 39 St. New York 18, N. Y. D. R. Tone, Assistant Secretary]

Jan 1, 1961

Lawrence Addicks, Perth Amboy, N. J. (communication to the Secretary*): The excellent series of photo-micrographs given in this paper shows clearly the relation between micro-structure and cuprous oxide in refined copper. The authors suggest that this method of examillation might be substituted for the " button " method now used to control the refining of cop

Jan 1, 1904

By Harry E. LeGrand

Most mine operations are hampered to varying degrees by excessive inflow of water into mines or scarcity of water for processing the materials. These internal problems are compounded in many cases by such external hydrological problems as lowering of ground-water levels in areas outside the mine properties, subsidence of ground surface, adverse geochemical changes, and pollution. The development of a mine below the water table disturbs the natural ground-water system, causing a convergence in the flow of water from a surrounding area. The mine becomes the apex of a depressed cone in the water table. The fact that mines are commonly located in complex and somewhat anomalous geologic environments prevents an idealized treatment of the mine as a well that would be similar to a water well in a homogeneous aquifer having isotropic conditions. Yet, adherence to some principles of ground-water behavior is helpful when combined with an understanding of the local geology. A program calling for an appraisal of all pertinent hydrological conditions prior to mining and during various stages of development should supply adequate information for mine officials to anticipate difficulties and to allow for corrective measures. Before and during mining operations there should be a mine hydrology framework and plan, in which there is continual upgrading of such considerations as anticipated actions, consequences of actions, remedial plans, and contingencies.

Jan 1, 1973

[Billings Petroleum Section: Fraser M. Burback, chairman; N. J. Matthews, first vice-chairman; Charles B. Evans, second vice-chairman; and lion M. Madden, secretary-treasurer. Meets 3d Tues., Petroleum Club. California Coastal Section: Jack R. Severns, chairman.; Gilbert L. Jemmott, vice-chairman,- Jack A. Biren, secretary; and Robert L. Richardson, treasurer. Meets 3d Thurs.] [ ]

Jan 1, 1961

Executive ROBERT E. TALLY, Chairman WILLIAM H BASSETT JOHN A. MATHEWS Louis S. CATER EDGAR RICHARD Finance HENRY KRUMB, Chairman H A GUESS H G. MOULTON Admissions ERLE V. DAVELER, Chairman GEORGE D BARRON H K MASTERS JOHN M. LOVEJOY P. A.-MOSMAN Alternates E. L. ESTABROOK C. E MEISSNER J. A. SINGMASTER FRED H. KAY

Jan 1, 1923

PRESIDENT BENJAMIN B. THAYER,1 NEW YORK, N. Y. PAST PRESIDENTS JAMES F. KEMP,1 NEW YORK, N. Y. CHARLES F. RAND,2 NEW YORK, N. Y. FIRST VICE-PRESIDENT SIDNEY J. JENNINGS,1 NEW YORK, N. Y. TREASURER GEORGE C. STONE,1 NEW YORK, N. Y. SECRETARY EMERITUS ROSSITER W. RAYMOND, NEW YORK, N. Y.

Jan 4, 1914

The information in Tables 1 and 2, on the operations in the Dutch East Indies and North Borneo, has been kindly furnished to the Institute through the courtesy of Mr. J. August Kessler by Mr. B. H. van der Linden. It affords a very good picture of the situation in that region for the year 1933.

Jan 1, 1934

[Allen-Sherman-Hoff Pump Co Third Cover Dee Carlton Brown,-Advertising Allis-Chalmers Mfg. Co. 8 Compton Advertising, Inc. American Cyanamid Co. 18,19 James J. McMahon. Inc. American Manganese Steel Div. American Brake Shoe Co. 20 Fuller & Smith & Ross, Inc. Anaconda Copper Mining Co. Kenyon & Eckhardt Inc. Atlas Powder Co. 11 The Aitken-Kynett Co..]

Jan 1, 1952

Executive ROBERT E. TALLY, Chairman WILLIAM H. BASSETT JOHN A. MATHEWS LOUIS S. CATES EDGAR RICKARD Finance H. A. GUESS HENRY KRUMB, Chairman H. G. MOULTON Admissions ERLE V. DAVELER, Chairman GEORGE D. BARRON H. K. MASTERS JOHN M. LOVEJOY P. A. MOSMAN Alternates E. L. ESTABROOK C. E. MEISSNER J. A. SINGMASTER FRED H. KAY

Jan 1, 1929

The Lake Superior Mining Institute, Ishpeming, Mich. A. J. Yungbluth, Secretary. An Annual Volume of Proceedings, carrying papers presented during the year, has been published since 1S83, with the exception of the years 1S97, 1899, 1907, 1916, 1918, 1919, 1920, 1921, 1924 and 1927. No meetings were held during those years and conse-

Jan 1, 1933

"Acta Metallurgica" Dennis Carney, &apos;59 Alfred Noble Joint Prize Committee F B Foley, Dec &apos;61 American Association for the Advancement of Science F T Agthe, Dec &apos;59, William L Fink, Dec &apos;60 American Geological Institute Arthur Montgomery, Oct , &apos;59, F C Kruger, Oct &apos;60 American Power Conference J P Weir, T D Hess American Society for Testing Materials

Jan 1, 1959

By N. L. Svensson

The model developed by Tuylor for the calculation of Polycrystalline yield strength has been applied to the case of an aggregate hawing a preferred orientation. In general this procedure requires the specification of texture by means of weighting factors applied to specific orientations. The problem to which the model has been applied is that of the yield-strength aniso-tropy of cold-rolled aluminum whose rolling texture was described as a combination of (110)[112] and (311) [112] In this case yield-strength anisotropy is defined by the rutio of yield strength measured at an angle 8 to the rolling direction to that measured along the rolling direction. The method of calculation of yield-strength ratio as a function of ? is described and the results show good agreement with experimental values. The orthotropic yield criterion suggested by Hill has been applied to the results and the strain ratio R also calculated as a function of ?. This has been compared with calculations using the method suggested by Elias, Heyer, and Smith which does not exhibit suck good agreement with observation. one deficietlcy of the method presented is that the strain ratios used by are those applying to iso-Irobic materials. The method should therefore be reg-clrded only as a first abbroximation to the prediction of anisotropy. THE problem of calculating the stress-strain characteristics of polycrystalline aggregates from the properties of single crystals has attracted attention for a number of years. The most important contributions to this study have been those due to: Sachs,&apos; Cox and sopwith,2 Taylor,3 Kochendorfer,4 Batdorf and Budiansky,5 Calnan and Clews,6 Bishop and Hill,7,8 Kocks,9 Budiansky, Hashin, and sanders, 10 Kroner,11 Cyzak, Bow, and payne, 12 Budiansky and Wu,13 and Lin.14 While the earlier work has been largely superseded, recent developments tend to support Taylor&apos;s solution" within the restriction imposed by his assumptions. The essential features of Taylor&apos;s approach were: 1) the material is rigid-plastic; 2) each grain experiences the same strain components as the aggregate as a whole (the problem was that of uniaxial deformation with principal strain components in the ratio 3) all regions of each grain deform uniformly; 4) work hardening occurs equally on all slip systems. While Bishop and Hill7 have generally validated this approach, there has been some criticism offered. Kocks? as pointed out that since multiple slip must occur the single-crystal data must be determined from orientations arranged such that polyslip takes place. Boas and Hargreaves,15 and others, have shown experimentally that the strain distribution within grains is not uniform, the strains in the vicinity of grain boundaries being less than those in the center of the grains. Both of these criticisms can be largely offset by the suitable choice of single-crystal critical shear stress. However, for the problem analyzed below, the critical shear stress is not directly used and, consequently, these criticisms lose their importance. The more recent contributions have attempted to obtain a more complete analysis by considering an elas-toplastic material and considering interactions between grains of differing orientations. Lin14 has considered the early stages of yielding for a polycrystalline aggregate having specific regions of defined slip plane orientations. On the other hand, Budiansky and Wu13 have allowed for these interactions for randomly disposed grain orientations and have calculated the polycrystalline stress-strain curves for crystals exhibiting either elastic-ideally plastic or kinematic hardening characteristics. This work has shown that yielding commences when the macroscopic stress is 2.2 times the critical shear stress for slip in a single crystal (7,). The yield stress-strain curve then rises becoming asymptotic to a value of 3.072 7,. This is close to the value obtained by Bishop and Hill (3.06) in their confirmation of Taylor&apos;s method. This, of course, is to be expected since, at large strain values, the elastic strains are negligible and the rigid-plastic model is satisfactory. The results of Budiansky and Wu indicate that the result obtained by Taylor is 7.7 pct high at a plastic strain which is two times the elastic strain at the initiation of yield. By defining the anisotropy in terms of relative values, the ratio of yield strength at orientation ?, to that measured in the rolling direction, the effect of the discrepancy in Taylor&apos;s solution is considered to be of lesser consequence. Therefore, it is anticipated that an analysis based on Taylor&apos;s solution, which can be quite straightforward, should provide a reasonable estimation of the anisotropy of materials having a preferred orientation texture. OUTLINE OF TAYLOR&apos;S METHOD In fee metals there are four possible slip planes (the octahedral planes) and in each there are three possible slip directions (the edges of the octahedron), that is a total of twelve possible slip systems. von Mises16 has shown that at least five independent slip systems must become operative in each grain of the polycrystalline aggregate in order to preserve continuity of strain. With this geometrical requirement as basis and the assumptions previously listed, Taylor determined the operative slip systems for a number of orientations of the tensile stress axis specified in the unit stereographic triangle. For the ith slip system, the critical shear stress

Jan 1, 1967

GERARD B. ROSENBLATT,* Salt Lake City, Utah (written discussion?). -Mr. Eschholz attacks this problem from what appears to me to be the proper angle. He does not limit his viewpoint to the attainment of ideal results under conditions approximating laboratory practice, but rather discusses actual commercial conditions that must be maintained in large-scale operations, where continuity of service without expert attendance is one of the prime considerations. I am of the opinion that Mr. Eschholz has not given sufficient consideration to the commercial possibilities of what he describes as System B, the use of low-tension a.-c. industrial or lighting circuits for supplying power to Cottrell treaters through the medium of a step-up transformer and a synchronously driven rectifier, without the use of motor-generators. It is true that, to date, few installations on a large scale have used this system, but I believe that when the conditions of power supply are suitable, and when proper precautions are taken, this system can be used successfully and to advantage. where at present it is considered necessary to use motor-generator sets. In the average commercial Cottrell installation of any size, the motor-generator set is used for two purposes: (1) To isolate the industrial supply circuit from the Cottrell circuit. (2) To. afford, an easily operated and smooth system of control for the Cottrell treater voltage With proper engineering, both of these objects can be accomplished without the use of motor-generator sets.

Jan 10, 1918