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By W. T. Martson

ABSTRACT Sooner or later, every producing mine faces the question of fill. This paper invites consideration of mill tailings as an economical, efficient, and quantitatively adequate source of such fill. Some of the advantages, disadvantages, methods of utilization, and methods of treating mill tailings for sand recovery are covered. ADVANTAGES AND DISADVANTAGES OF SAND FILL DISREGARDING economic com-promise, that material which supports the greatest applied load with the least compression is the best choice for fill. Table I, reproduced from U. S. Bureau of Mines Bulletin 60, is offered as evidence of the adequacy of hydraulically placed sand. Table II gives the results of tests made in an effort to determine the reason for the difference between load hearing qualities of dry-placed and hydraulically-placed sand. From these, it would appear that hydraulic placing gives a denser initial packing, with corresponding higher, and faster development of, load bearing qualities. Assuming this to be true, then if sand from mill tailings can be placed underground economically, it is the superior fill material. Table III summarizes cost data available. The most cursory glance through the available references (2, 5, 6, 7, 8, 9) will show .that the major benefit from the adoption of sand fill is a decrease in the non-productive fill ?cycle of a working place. This, it is estimated, increases the output of an individual stope by from 25 to 50 per cent. The advantage of reducing the number of required working places for a constant daily production is obvious.

Jan 1, 1951

By Adam Turcotte

Mining operations consume a considerable amount of energy, and while reduced energy consumption is desirable, it is not always clear how to achieve this goal. Understanding the opportunities to optimize energy consumption is crucial, and the key to understanding is visualization. One option is the Sankey diagram, which has been used for over 100 years to visualize the flow of energy, materials, or cost through various processes. However, there are drawbacks to this approach that must be addressed. In a Sankey diagram, each flow is represented by an arrow possessing a width proportional to the magnitude of the flow it represents. The diagrams show input flows, how energy is converted and into what form, and also output flows. As per the first law of thermodynamics, the total energy output is equivalent to the total energy input, so any energy that is not transferred to another process is considered to be wasted. These waste flows are depicted in Sankey diagrams and make it straightforward to associate energy sources, sinks and waste flows. Unfortunately, Sankey diagrams do not convey all information required to support practical decision making for redirecting individual energy flows. Based only on a Sankey diagram, it may become evident that a significant flow of waste heat is of the appropriate grade (temperature) and volume to meet an on-site heat demand currently being met with paid-for, possibly carbon intensive fuel. However without augmenting the Sankey diagram with 3D spatial, true geometric analysis, the practicalities of the concept or idea may not be fully appreciated. Another issue with a Sankey diagram is that the magnitude of the energy flowing between processes may have temporal fluctuation or variability on different timescales (diurnal, seasonal, interannual). Currently, Sankey diagrams only provide a static picture of energy conversion and consumption, so that, for example, 4 separate diagrams could have to be prepared for each season. A new energy flow visualization technique which we have called Sankey Trees has been developed. Process locations are defined within a 3D model of the site being studied, and the magnitude of the flow between each pair of processes considered is replaced with a time series. Branches of sustained and diminishing flows are represented through variation of the geometric properties of the branches of the trees. These branches are animated to indicate the direction of flow, and branch joints are used to indicate that a process is transporting one form of energy to multiple processes.

Aug 1, 2013

By D. Duffy, V. Papangelakis

"MgCl2 brines present a number of potential advantages for the processing of saprolite ores for nickel production. With a chloride system it is economically requisite to recover hydrochloric acid, which can be performed in a more energy efficient manner by precipitation and subsequent decomposition, as compared with conventional pyrohydrolysis. In addition, concentrated MgCl2 solutions enhance the activity of acid used, allow atmospheric leaching at elevated temperature and inhibit magnesium dissolution, which reduces acid consumption and increases metal selectivity. Leaching and iron control experiments have been conducted in concentrated MgCl2 brines, up to 4.5 m, to determine the most amenable process conditions. INTRODUCTIONChloride metallurgy has received an increasing amount of attention in recent years, especially with respect to the treatment of nickel laterites. Although the limonitic fraction can sometimes be economically treated by High Pressure Acid Leaching (HPAL), acid-consumption problems are encountered with the higher magnesium content of the saprolite fraction. As magnesium does not hydrolyze under HPAL conditions, as iron and aluminum do, any sulphuric acid used to leach magnesium is subsequently neutralized and wasted. In addition, this magnesium must later be disposed of in some fashion, further complicating the process. The most common method used to process saprolite is the Rotary Kiln-Electric Furnace (RKEF). This uses a kiln to dry and preferentially reduce nickel, before sending the calcine to an electric furnace. Although nickel recoveries are high, and the problems of acid consumption are avoided, the capital and energy costs associated with this process are high (de Bakker, 2011).The problems outlined above have led to the investigation of an atmospheric chloride process for the treatment of saprolite ores. The use of a chloride system presents a number of advantages, but also a few limitations. Metal chlorides tend to be very soluble, with a few notable exceptions (silver, mercury and lead), allowing for smaller processing equipment through more concentrated solutions. This solubility also serves to reduce the potential for scale formation. In addition, a hydrochloric acid leach is more aggressive than a comparable sulphuric acid system, and the activity of the hydrogen ion can be augmented by further chloride addition (Peek, 2011). This activity augmentation in concentrated chloride systems, first reported by Jansz, has repeatedly been referenced as a motivating factor behind chloride hydrometallurgy (Jansz, 1983; Harris and Magee, 2003; Harris et al., 2004; Demopoulos et al., 2008; McDonald and Whittington, 2008; Demopoulos, 2011; Peek, 2011; Verhulst and Lakshmanan, 2011). This activity increase allows a similar amount of acid to perform more in a concentrated solution than in a dilute solution, decreasing overall acid requirements. As such, much focus has been placed on leaching in concentrated chloride systems, or brines, using calcium, magnesium or sodium as the cation (McDonald and Whittington, 2008)."

Jan 1, 2012

By C. Gosselin, M. Rheault, M. Benoit, Y. Bouroubi, V. Sarago

The last three decades have seen significant mining development in northern regions of Canada, where the freeze and thaw cycle of permafrost and the corresponding surface subsidence and heave represent a significant challenge to the design and maintenance of infrastructures. Identifying areas at risk is of great assistance to reduce the impact of this issue. Over the past ten years, Synthetic Aperture Radar Interferometry (InSAR) has been widely used to monitor ground surface deformation. With this technique, changes in phase between two SAR acquisitions are used to detect centimeter to millimeter surface displacements over a large area and with high spatial resolution. InSAR can be used as a tool to assist the siting and design of new infrastructure as well as highlighting the risk to existing structures in areas of unstable terrain. This paper presents the results of a project carried out by Effigis, which made use of SAR interferometry in the context of monitoring terrain and infrastructure stability in a northern mining environment that is affected by permafrost seasonal and long term changes. TerraSAR-X images acquired during two periods, August to November 2012 and March to October 2013, were used to measure the deformations and/or movement of ground surface, infrastructure and stockpiles caused by seasonal changes in permafrost extent in and around a mining site located in Nunavik, Quebec. The results showed that spatial and temporal distributions of surface displacements are in accordance with scientific and terrain knowledge. Some displacements were observed in loose soil areas while, as expected, none were detected in bedrock and rock outcrop areas. The areas most affected by active layer changes showed surface subsidence in the thaw settlement period. This study confirms that SAR interferometry has a great potential for operational applications related to risks induced by surface deformation in mining environments. It shows that this technique can be used to produce reliable maps of surface movement and monitor the vertical displacement of important infrastructure.

Jan 1, 2015

"SART technology is a useful tool for improving the economics of gold recovery from certain types of complex gold ores. SART liberates cyanide consumed by base metals such as copper, zinc and nickel, and enables the newly freed cyanide to be recycled to precious metals leaching while producing high-grade base metal sulphide concentrates for sale. The benefits of SART include the reduction in cyanide consumption, avoidance of cyanide destruction costs, minimization of risks of environmental non-compliance due to residues of cyanide destruction reporting to mine effluents, and generation of extra revenue from the sale of base metal concentrates. Concerns with SART typically include uncertainties around capital and operating costs and proper integration of SART into the overall metallurgical flowsheet. This paper presents two case studies addressing these concerns. The first involves actual costs of the full scale SART integrated into a gold heap leach operation and treating up to 500 m3/hr of leach solution at a mine in Mexico. The second involves field pilot testing and a preliminary cost estimate for integrating SART into a silver mine in Peru using Merrill Crowe.INTRODUCTION One of the current trends in the gold industry globally is the increasing importance of complex polymetallic gold deposits as discoveries of large Carlin type gold deposits become increasingly rare (Sceresini, 2005). The presence of cyanide soluble copper and zinc in complex gold deposits necessitates changes in traditional gold extraction metallurgical flowsheets. One of the tools available to the industry to help deal with interferences of cyanide-soluble base metals in gold extraction is the SART (sulphidization-acidification-recycling-thickening) process. SART breaks the weak acid dissociable (WAD) base metal-cyanide complexes, precipitates the metals as high-grade sulphide concentrates and makes the freed cyanide available for recycle. Although SART is a commercially available technology, it is still relatively new to the industry. Fewer than ten (10) full scale plants have been constructed in the past couple of decades. Some of these SART plants are small, most are located at remote sites, and the majority have not operated on a continuous basis. This has resulted in a general lack of information in the industry about the true costs, operability and metallurgical performance of SART. BQE Water has been involved in the design, construction, commissioning and operation of large scale SART plants in Mexico, Turkey and Chile and has conducted field testing programs as part of the technical assessment of SART integration into various metallurgical circuits. Having built and operated numerous plants utilizing selective sulphide precipitation of heavy metals, BQE Water has gained unique insight into the design and control of the sulphidization stage of SART to minimize costs and ensure high efficiency in cyanide recovery."

Jan 1, 2017

By T. Avilez, D. Salari

"The economics of developing gold deposits containing elevated levels of cyanide soluble base metals is often challenged by high cyanide consumption and increased operating costs. SART is a chemical process that enables cyanide consumed by base metals to be recovered and recycled for gold leaching. The process also provides concurrent recovery of the base metal to generate incremental revenue from the sale of high-grade base metal sulphide concentrates. Although SART was developed and successfully piloted by Lakefield Research and Teck Corporation in the late 90’s and is now a public domain technology, the adoption of SART has been relatively slow due to concerns about implementation costs and the reliability of metallurgical performance. Through extensive experience in selective metal sulphide precipitation applied to mining wastewater since 2007, BQE Water has provided process know-how, design along with operations and maintenance experience to a number of projects involving the integration of SART into various metallurgical flowsheets on an industrial scale. This paper presents the commissioning experience and operating data from a SART plant treating up to 500 m3/hr of leach solution at a heap leach operation in Mexico. INTRODUCTION One of the current trends in the gold industry globally is the increasing importance of complex polymetallic gold deposits as discoveries of large Carlin type gold deposits become increasingly rare (Sceresini, 2005). The presence of cyanide soluble copper and zinc in complex gold deposits necessitates changes to the traditional gold extraction metallurgical flowsheet. A tool available to the industry to help manage the interference of cyanide-soluble base metals in gold extraction is the SART (sulphidization-acidification-recycling-thickening) process. SART breaks the weak acid dissociable (WAD) base metal-cyanide complexes, precipitates the metals as high-grade sulphide concentrates and makes the freed cyanide available for recycle."

Jan 1, 2018

By W. G. Worcester

THE chief object in presenting this paper on bentonite is to attract general attention to one of the least known and most neglected industrial minerals of Canada, a mineral of extensive commercial possibilities, as evidenced by its development and exploitation in other countries, principally in the United States and Germany; countries upon which some of our most important Canadian industries are dependent for their supply of special clays, such as Fuller's earth and activated bentonite. It was in view of these conditions and the knowledge of the presence of large quantities of bentonite in the Canadian West that the work here reported on was under-taken. While the investigational studies have not been completed, the results indicate that among the many samples tested there are some of real merit and industrial importance. While it has been the author's privilege to examine deposits and samples of bentonite from all of the Western provinces, his chief activities in the field and in research studies have naturally been confined largely to Saskatchewan materials. Notwithstanding this, however, this paper is presented in the hope that it may stimulate a more general interest in, and study of, Canadian bentonites as a whole, a matter of such importance that provincial boundary lines should be overlooked. GENERAL CHARACTERISTICS OF BENTONITE According to Schurecht and Donda (1), bentonite is commonly composed of the mineral montmorillonite, (Mg,Ca)O.Al203 5SiO2 .nH2O, though some are known to consist of beidellite, Al2O3 3SiO2.nH2O: where n is approximately 4, and in certain cases the Al2O3 may in part be replaced by Fe2O3. For present purposes, however, it may be sufficient to state that, in general, bentonite is a "soapy' clay-like mineral or group of minerals composed largely of hydrous aluminium silicate, but frequently carrying small percentages of the alkalies, alkaline earths, and free silica, as well as silicates, gypsum, and other admixed detritus such that purification is usually necessary.

Jan 1, 1937

By W. G. Worcester

Generally speaking, the term 'clay' appears to convey but little to the average layman other than of a sticky substance to be rigidly avoided when making a cross-country drive in the family ark- especially so if the chains have been left behind. On the other hand, the technical ceramic; engineer, though his chariot be bogged in the self-same mud-holes, will, more than likely, be planning on ways and means for the conversion of the troublesome gumbo into paving bricks over which all might ride with pleasure and security. However, to come to the point, the term 'clay' bears much the same relation to the ceramic world that the term 'ore' does to the metallurgical; in other words, as there are many kinds of ores, so also are there many kinds of clays, and it therefore becomes necessary to classify and sub-classify them previous to a discussion of their relative values and importance. Hence, a brief digression will be made from the main topic of this paper in order to enumerate and classify a number of the more important types of clays. By so doing, the relative position of Saskatchewan clays, later discussed, will be better understood.

Jan 1, 1929

By W. J. Jenner

"Introduction The Saskatchewan Power Corporation is a provincial crown corporation which operates under a mandate to supply all customers within Saskatchewan with electricity and natural gas. The Saskatchewan Power Corporation operates two coal mines within the province of Saskatchewan. The Souris Valley Mine is located a few miles south of the city of Estevan and produces approximately 300 000 Mg of lignite per year. The lignite is shipped about four kilometres by truck and burned at the 882 MW Boundary Dam Power Station, also owned by the Saskatchewan Power Corporation. The Poplar River Mine is located just south-west of the town of Coronach, Saskatchewan which is some 190 kilo metres west of Estevan. This mine produces approximately 1 675 000 Mg of lignite per year. The lignite is shipped seven miles by rail to the Saskatchewan Power Corporation's Poplar River Power Station. The Poplar River Mine is the sole sup plier of fuel to the Poplar River Power Station, which generates some 300 MW of electrical power. A second 300 MW unit is due to be commissioned at the Poplar River Power Station in mid-1983 and the Poplar River Mine will have doubled its capacity to approximately 3 350 000 Mg per year by that time: Souris Valley Mine Geology The Souris Valley Mine extracts lignite from the Estevan seam of the Ravenscrag Formation. This formation is of Tertiary age and was deposited during the Paleocene Epoch. The Ravenscrag Formation outcrops throughout southern Saskatachewan and all coal mined in the province occurs in this formation. Ravenscrag sediments are deltaic in origin and are composed of a series of fine sands, silts, clay and lignite deposits."

Jan 1, 1985

By M. H. Allan

"This paper presents the geographic and geological setting of Saskatchewan Power Corporation's Poplar River Mine in south-central Saskatchewan, about 8 miles from the U.S. border. Generally the mine, which is being expanded to four million tons per year, is in an extremely disturbed geological area with severe dewatering problems. The lignite coal, which is strip mined, is supplied directly to an electric power generating station by means of a 7-mile unit-train private railroad.A number of unique reclamation and socio-economic problems were encountered because of the proximity to the U.S. border and because of the lack of experience of the regulatory authorities in projects of this kind. These are described in some detail, as well as the performance of one of the largest draglines in Canada. IntroductionThe Saskatchewan Power Corporation is a publicly owned utility which has the franchise to supply electricity and natural gas to all customers within the boundaries of Saskatchewan.Saskatchewan is a province which can almost be divided in two: the populated southern portion, principally devoted to farming, and the northern portion which is mostly on the Precambrian Shield and consists of lakes, rocks and muskeg. This portion is largely uninhabited except for a number of small villages. However, in the last few years there has been considerable mineral exploration and development, notably for uranium. This has helped considerably in the diversification of the basic agricultural economy of the province.Saskatchewan consists of 251,700 square miles, 761 miles north to south and an average of 335 miles east to west. It has a population of approximately 960,000, giving a population density of four persons per square mile. The Saskatchewan Power Corporation supplies 357,249 electrical arid 221,378 natural gas customers."

Jan 1, 1982

By T. Adamcewicz

The province's lignite resources lie mainly in the south, extensions of the much larger deposits in Montana and North Dakota. Because of planned additional capacity, conventional steam power generation will probably remain as the dominant resource usage for many decades. Conversion of coal to other energy forms is receiving emphasis and in the future will compete with steam power generation in terms of quantities used.Economic deposits, minable by present-day technology, have been generally defined. Because a large percentage of the total lignite resource is in seams containing multiple partings, future extraction will become much more difficult and capital intensive.Increased public involvement will ensure that the impacts of future coal mining and usage operations are compatible with environmental and social objectives.

Jan 1, 1982

An essential tool for every step ? Early field survey ? Handheld satellite phones ? Portable satellite phones ? Exploration and Drilling ? Handheld satellite phones ? Portable satellite phones ? Production ? Handheld and portable ? Fixed Satellites systems ? Asset tracking systems Main applications via satellite ? Voice and Fax communication ? Internet access and E-mail ? Video conferencing ? Interconnection to mobile phones, 2 way radios, long range WIFI ? Equipment Tele-maintenance ? Telemedicine ? Crew and morale calling ? Vehicle and asset tracking

May 1, 2006

By Vahid Faghihi

SatraPM is a web-based software package, aiming to help project managers to easily handle their construction projects via internet. This software is capable of handling all projects of an organization, in which all projects can be defined in EPS the same as users in OBS. A 3D accessing module links EPS, OBS and inherent functions in order to provide a secure environment for the data to be processed throughout the system. This paper intends to take a deeper look at capabilities of SatraPM in helping project managers to keep track of and control their construction projects as well as its potential future features.

Aug 1, 2013

By W. F. McDermott

This paper covers the development, construction and operation of a 53-mile slurry pipeline operating in Tasmania, Australia. Special development techniques are discussed, as well as the operation of this line and its impact on transportation from remote areas.

Jan 1, 1970

By Michael G. Rulff, Tracy M. Holmes

"Vast amounts of time and money are spent fighting flow problems in plants that involve the handling or processing of industrial minerals. Because these types of projects tend to be capitalintensive, the right decisions, made at the design stage, can have a substantial positive effect on the economics of the project.Some of the problems related to solids flow in mineral processing plants include:•,Flow stoppages•,Uncontrolled flow•,Segregation of blended materials•,Build-up and dead material resulting in loss of live capacityUnfortunately few Universities in North America provide courses in the design or selection of bulk solids handling equipment, let alone the theory of bulk solids flow, with the result that engineers do not fully appreciate the effects of bulk solids handling on their process. The usual method of selecting “standard” equipment, all too often, leaves plant operators hammering on hoppers to promote flow, a technique that is not only usually ineffective but also unsafe and often causes damage to equipment. In short, too little consideration is given, at the design stage of projects, to the particular material and operating environment involved and how these will affect handling between process steps.This paper seeks to give a general understanding of bulk solids flow theory including flow patterns and flow property tests, and presents functional design guidelines to ensure reliable flow. As well, a case history will be presented. Our message is clear: To ensure uniform, reliable flow, a plant design must take into account the specific flow characteristics of the bulk solid to be handled or processed."

Jan 1, 2008

By N. Shi, T. G. Joseph

ABSTRACT: A prototype test dipper (at 1/20th volume and a geometric operating scale of 2.85) was compared during field trials against a conventional dipper with the same tare weight using the same test shovel. Both dippers followed similar dig trajectories, invoked by the shovel operator. A Microsoft® Visual Basic-embedded spreadsheet was used to interpret qualitative visual and quantitative numerical loading data collected on the hoist and crowd dig response. Overall the concept dipper, even with a 50% greater capacity, provided indications of a smoother dig cycle with lower peak hoist loading events and a lower energy per unit excavated.

Jan 1, 2011

By Dennis V. Woods, J. Duncan Crone

"In order to determine its capabilities and to aid in the interpretation of fie ld results, a scale model study and field tests were carried out on the Crone borehole pulse electromagnetic (PEM) system. The model results indicate that if a borehole passes in the vicinity of a tabular conductive body, the system will not only detect the presence of the body, but will also return information as to its conductivity-thickness product, size, altitude and position.The effect of variation of these electromagnetic and geometric factors on the shape of the response curve from a borehole PEM survey is displayed by a number of suites of scale-model response curves. These model curves can be used directly as type curves in the interpretation of field results. Field tests of a prototype PEM system provide a check on the scale-model results and also summarize the procedure of interpreting field data using the model type curves.The borehole pulse EM system can be effectively used as a follow-up geophysical instrument for locating and delineating known conductive bodies. It can also be profitably utilized as a primary geophysical exploration tool in areas of deep mineralization below the depth limit of conventional airborne and ground geophysical systems. The probed area of a diamond drill hole in these cases is increased from a 1- inch drill core to a zone extending hundreds of feet from the hole."

Jan 1, 1980

By A. Becker, C. Gauvreau, L. S. Collett

"A scale model was designed to simulate the airborne Barringer INPUT time domain electromagnetic system. The amplitude of the response to a vertical conductive dyke varies considerably with the conductor's thickness conductivity product (TCP). The response increases from a minimum detectable level at a TCP of about 2 mhos, rises to its maximum value at a dyke TCP of 15 mhos and then falls again so that conductors with a TCP exceeding 500 mhos would probably remain undetected. Measurements made with both standard receiver coil configurations (maximum or minimum coupled) indicate comparable effectiveness for both systems, either from the viewpoint of vertical conductor detection or from the viewpoint of discrimination against overburden anomalies."

Jan 1, 1972

By Laura A. Sanders

Mineral scale formation is prevalent in numerous mining operations. Such scale formation can occur in the direct-contact heat exchangers ahead of an autoclave. In these heat exchangers, the incoming slurry comes into contact with steam in a stage-wise fashion, which is re-circulated from the downstream flash vessels to heat the slurry in stages ahead of the autoclave. Calcium sulfate scaling causes severe problems in mining operations where increased temperatures are involved due to rising temperatures promoting calcium sulfate scaling through a decreasing solubility. In a number of these operations, the scale formation can occur in the presence of mineral solids, where fine-grained charged particles are at concentrations in excess of 35%. Scale prevention is not difficult in standard aqueous systems; however, the presence of solids leads to significant deficiencies in the prevention of scale due to the adsorption of the polymer onto the charge solids instead of the polymer interaction with the scale. Therefore, a technical solution to prevent mineral scale build up occurring in presence of pulp slurry in mining operations is needed. Several novel antiscalant technologies were developed and evaluated which provided a substantial improvement in the scale prevention in such systems.

May 1, 2013

By L. M. Nolan

Chemical Mechanical polishing, or CMP, has four components in the polishing interface; namely the polishing pad, the polishing fluid, the abrasives in the fluid, and the surface being polished. Understanding the way that load is transferred between these components is key to understanding and predicting wafer polishing. Numerous models of CMP and the different load sharing arrangements which occur between these four components have been proposed. These include models by Luo and Dornfield (1) and Fu, Chandra and colleagues (2). Other models focus on just one or two loading arrangements, such as `hydroplaning' when all load is transmitted by the liquid in the case of Runnels and Eyman (3). In this work, we consider four possible combinations of load transfer from pad to wafer in CMP. These combinations are listed below in Table 1 and are illustrated schematically in Figure 1. It is important to note the role of scale in this process; the illustrations in Figure 1 are drawn to scale from actual profilometer scans obtained over a length of 5 with particles of 150 nm in diameter. Table 1 - Load Transfer Combinations Load Regime Illustration Wafer - Fluid - Pad Figure la Wafer - Particles/Fluid - Pad Figure lb Wafer - Particles - Pad Figure lc Wafer-Pad Figure ld The interest in load-sharing between the system components is because some configurations are anticipated to achieve higher polishing rates than others. For instance, in hydroplaning, or hydrodynamic lubrication, the lateral force exerted on the polished surface by the particles can be no higher than the fluid shear force developed in the gap between the pad and wafer. This is not expected to generate high rates of material removal from the surface (4). For contact that is largely between the pad and the wafer, such as the regime depicted in Figure ld, the lateral load is transmitted to the wafer by the pad and is hence limited by the pad's low rigidity. This regime is not expected to generate high material removal rates either. The highest levels of material removal are expected from regimes where the mechanical load exerted on the system is transmitted by the particles, in combination with either the fluid or the pad. Under what circumstances does the polishing regime change from one to another? What must occur in order to initiate or terminate contact between the system components? This is an ongoing question in the field of tribology, and has traditionally been viewed in terms of the pressure and velocity applied to the system, the thickness of the fluid film between the two surfaces, and the roughness of those surfaces (4). In this paper, we propose a new mechanism ? that the load on the particles may be sufficient to totally embed them in the polishing pad, at which point they are no longer able to transmit load and polish the wafer surface. This is illustrated schematically in Figure 1(d).

Jan 1, 2010