Search Documents

By Sadough vanini Ali

Hot deformation behavior of functionally graded steel (FGS) was investigated via conducting hot compression tests at different temperatures and strain rates. Functionally graded steels consist of ferrite, austenite, bainite and martensite layers that are made by diffusion of alloy elements during the melting process. The zenerhollomon parameter has been used to describe the flow stress variations as a function of temperatures and strain rates. The parameter values for all the layers via using the boundary conditions was determined based on composite graded behaviors. Furthermore by applying the rule of phase mixtures, the whole strain rate applied on composite would be the sum of layers strain rates considering the layers volume fraction, while the layers have the same stress. Consequently the composite flow stress for each strain rate and temperature was determined.

Oct 1, 2011

By S. Rash Ahmadi

One of the most important elements in power plants is rotors and repairing the damaged rotors is very important in view point of economics. One of the most complicated problems in power plants is increasing of stiffness of the turbine rotors. This problem which occurs mainly due to thermal shock or rubbing makes to exit damaged rotor from service. These elements can be repaired effectively by heat treatment methods. Tempering heat treatment is the most common solution for straightening of damaged rotors but it requires having good knowledge about heat treatment parameters (temperature and time) and their affects on fundamental properties of rotors. In this article, a suitable method is introduced in order to modify the increased stiffness in journal part of rotors due to martensite transformation, using heat treatment tempering process.

Oct 1, 2011

By A Sadough Vanini

In this paper large deformation of smart functionally graded beams with initial imperfection and under thermal loadings is considered. Smart beam consist of two types of layers. One layer is made from functionally graded materials and a layer or a set of layers from active materials that usually is made from piezoelectric materials that are bounded on the surfaces of beam. An active controller is used for controlling the deformation and stress in functionally graded layer of beam. A simple Euler- Bernoulli beam theory is used for analyzing of beam. In functionally graded layer the material property vary continuously through the thickness direction and power law model is used for the variation of elastic modulus, heat expansion and heat conduction coefficients. Poisson ratio is assumed to be constant in functionally graded layer. The effects of varying the power law constants and the Gain of controller is considered here. The results are reduced and compared with smart functionally graded beam without initial imperfections.

Oct 1, 2011

By S. Rash Ahmadi

Thin brittle coatings are deposited or developed on component surfaces for different reasons. In many practical applications the coatings are stressed by externally applied loads. Under such conditions, coating failure can occur. In this paper the probability of the extension of surface crack in coated materials due to cylindrical sliding indentation is analyzed. Contact loading problems typically result in multi-axle and strongly inhomogeneous stress fields near the contact surface. This property which strongly affects the stress intensity factors is taken into account in the failure analysis. Edge cracks were selected to model the actually accruing surface flaws. A suitable method is described for calculating the contact stress fields in coating and substrate. The coating is idealized as a brittle-elastic layer of uniform thickness, which is bonded to the surface of a half space. Method of linear elastic fracture mechanics are then used to calculate the load required to cause fracture in the coating.

Oct 1, 2011

By Sadough vanini Ali

Charpy impact energy of functionally graded steels produced by electroslag remelting in crack divider configuration has been modeled in various strain rates. It has been well known that majority of materials indicate different behaviors under different strain rates and temperatures. Therefore, modifying the elastic-plastic model considering the effects of strain rates and temperature gives us an acceptable prediction of these composites behaviors in impact test. In this investigation, graded steel was divided in to several layers in which the layers have the same strains under the impact. Constitutive equation describing the flow stress variations as a function of strain rates and temperatures, have been used to express the stressstrain behavior of layers. The parameter values of constitutive equation determined for all the layers via using the boundary conditions based on composite graded behaviors which were the characterized ferrite, austenite, bainite and martensitte phases. Consequently by applying the rule of phase mixtures and ascribing the impact energy of each layer to the area of stress-strain curve of the same layer, the whole impact energy of composite is the sum of layers impact energy with considering the layers volume fraction.

Oct 1, 2011

"The standards set out requirements of the Toronto Stock Exchange for company’s providing information to investors, regulators and/or the media regarding their mineral properties. In addition, information contained in new releases, continuous disclosure documents [annual report], or other forms of communication [printed investor relations materials and electronic publications] are also subject to these standards.1.0 INTRODUCTIONThe disclosure of the results of exploration and development activity on mineral properties mustcomply with the requirements of the Toronto Stock Exchange Policy Statement on Timely Disclosure, theOntario Securities Act and all applicable policies and rules of the Ontario Securities Commission and anyother securities regulatory body having jurisdiction over an issuer listed on the Exchange. In particular,the requirements of National Instrument 43-101 must be followed.The purpose of the standards is to set out the requirements of the Toronto Stock Exchange when acompany provides information to investors, regulators and/or the media regarding its properties, whethersuch information is contained in a news release, a continuous disclosure document such as an annualreport, or other form of communication, including, but not limited to, printed investor relations material andelectronic publications such as Internet Web sites. These standards do not apply to prospectuses orlisting applications, the standards for which are contained in the policies and rules of the securitiescommissions and the Exchange. These standards are also not intended to establish requirements for thecontent of technical reports.Any information published by or on behalf of a company must comply with these standards. If acompany becomes aware of information published by others regarding its mineral properties which ismaterially misleading to investors, it should take appropriate action to correct such information orotherwise make it known that it is not responsible for publishing such information and does notnecessarily agree with such statements.Disclosure concerning mineral properties should identify the ""qualified person"" as defined in NI 43-101 who is responsible for the work conducted on the property and such person shall have read andapproved of the technical disclosure."

Jan 1, 2003

By S. Rash Ahmadi

Welding is highly reliable and efficient metal joining process. In welding the metal adjacent to the weld joint is subjected to severe thermal conditions. As a result, complex changes in metallurgical structure occur in this region. These changes in structure depend on the material and the temperature history experienced. Friction stir welding (FSW) is relatively a new welding process in which, heat is generated by friction between the tool and the workpiece. The amount of heat conducted into the workpiece determines the quality of weld, residual stress and distortion of the workpiece. The objective of the current work is to study the transient temperature in a friction stir welding. So, a three dimensional transient analytical model is used to study the thermal distribution during the welding. Heat input from the tool shoulder alone is considered in the model. The process parameters like axial load, welding speed and tool rotational speed, used in actual FSW process are taken to build the model. This analytical model is very useful for select the optimized affected parameters in friction stir welding. The model illustrates the comprehensive equation including actual affected parameters in FSW and it can be used for different materials. In addition to the above the thermal history finds application in design of welding tools.

Oct 1, 2011

By J. Starkey

A comminution circuit in recent history, is one of the most difficult parts of a mineral processing plant to design with confidence. It is usually the most costly part of a plant to build, and it can consume up to half or more of the energy used on a mine site. To suggest that comminution energy usage is sustainable in the long term is not possible at this time. What we have to choose from today, based on more than 50 years of experience, does include the best available technology, and the best way to design it. There is controversy in the industry as to how to properly approach the subject of comminution design, with many of the optional solutions requiring a level of training and expertise beyond the ability of a non-specialist engineer. Semi-autogenous grinding technology in particular, has not been properly appreciated because of many recent mistakes in its application and design, which have blurred the positive perception about what SAG technology is, how it can be used, and how it needs to be designed and built. In order to change this, mine owners and senior managers need to take responsibility for, and learn to understand the fundamental challenges that a comminution circuit poses to the project, to the design process, to the operators who use the equipment, and to the resulting metallurgy. This address is intended to summarize these challenges and offer fundamental engineering solutions, which are clear, specific and in a format which is directly applicable to the mining and mineral engineering community.

Jan 1, 2018

By P. H. Shipway, D. G. McCartney, H. Saghafifar

The microstructural changes during thermal ageing at 650ºC in the interfacial region of Alloy 625 weld overlay on a 2.25Cr-1Mo steel was evaluated. Optical microscopy, scanning electron microscopy in SE and BSE modes, electron probe microanalysis and hardness mapping were used to characterize as-welded microstructure and its changes during thermal ageing and precipitates of interfacial region. Carbon migration across the interface was recognised as a major issue. A region of 300 µm wide adjacent to the fusion line, which was found harder in the as-welded condition decarburized during thermal exposure. Studies revealed that this region transformed to a soft region containing large ferrite grains and micron-sized carbides. In the weld overlay, a 50 µm wide hard band (over 650 Kgf mm-2) adjacent to the fusion line formed and carbide precipitates were observed along grain boundaries. Carbide precipitation mostly occured in the 150 µm wide region close to fusion line.

Jan 1, 2017

By S. A. Sadough vanini

In this paper, Stress-Strain-Temperature relations for Shape Memory Alloys are studied. Temperature effects on Shape Memory Alloys are different from those related to ordinary materials. In ordinary materials, elastic characteristics can be assumed to be constant in low temperature ranges, and only the deflection arising from temperature changes could be added to the elastic defection. As long as two phases of austenite and martensite could be present in Shape Memory Alloys simultaneously, elastic modulus follows temperature and temperature gradient. In continue a smart actuator is investigated considering a homogeneous cantilever beam. Beam bending is established by using shape memory wires. An initial strain is imposed to shape memory wires in a low temperature, and then, they are installed in the outer surface of the beam. Therefore, since the temperature is imposed in these wires and they cannot have free recovery strain, the compressive recovery stress will be produced in the outer surface. This will result in a deflection in axial direction of the beam. At first, beam deflection is calculated on the basis of theoretical relations and solving the relevant differential equations. Afterwards, experimental tests are performed on an elastomeric beam equipped with shape memory wires. When a voltage is applied, a temperature rise will occur in the wires; then, this temperature rise causes a deflection in the beam. Finally, the theoretical and experimental results? comparison indicates a good conformity. One capability of this actuator is its high flexibility, and by controlling the inlet current, the end-beam deflection can be controlled.

Oct 1, 2011

By S. Banisi, J. Marois, A. R. Laplante

"This paper compares the behaviour of gold and ore in the grinding circuit of Hemlo Mines Ltd. Particular attention is given to grinding kinetics, classification behaviour, and liberation. For grinding kinetics, laboratory grinding of gold flakes and silica, 840 µm to 1200 µm in size (14/20 mesh), was also performed to provide a standard for comparison and to study in a controlled environment the mechanisms of breakage, folding , smearing and impacting.Grinding kinetics were characterized at laboratory scale with breakage and selection functions. The breakage function showed that 75% of gold disappearing from the 840 µm to 1200 µm class reported to the 600 µm to 840 µm; this figure is much higher than for silica (46%) or most other minerals, and implies that comparatively fewer fine fragments are produced from the breakage of gold flakes, on account of gold's malleability. The selection function of silica was four times that of gold. At plant scale, the ratio of the selection function of ore and gold increased from 6 for at 50 urn to JOO pm to 20 at 500 um to 1000µm.Observation of original flakes and their fragments with the scanning electron microscope showed that the main mechanism of ""grinding"" from the 840 µm to 1200 µm to the 600 µm to 840 µm class was folding rather than actual breakage. This was confirmed by a measure of individual flake weight. The postulated breakage cycle is that relatively globular flakes become increasingly serrated through grinding; they can then regain their original shape through folding and reflattening into cylindrical and spherical shapes, as the majority does; however, some fragments will at this point undergo actual breakage. Photograhic evidence is presented to support the proposed mechanisms.Smearing of gold unto silica was observed when silica was ground after a gold, and embedding of silica into gold flakes when gold was ground after a silica. Both mechanisms occur whenever gold and harder minerals are jointly ground, and result in ""unliberation"" of gold. It is postulated that smearing of gold onto other minerals plays an important role in explaining how gravity recovery can increase over-all gold metallurgy, especially when used ahead of flotation.Classification of gold in the primary hydro cyclones takes place at a much finer cut-size than ore, 20 µm vs 57 µm. This and the slower grinding kinetics result in high gold circulating loads in the primary loop, 6700%, and a gold content in the primary cyclone underflow (PCUF) is twenty-four times that of the ore. The gold size distribution for primary cyclone overflow is much finer than that of the ore, although they are essentially similar in the PCUF.Liberation, or more accurately ""gravity recoverability"", was assessed with a 7.5 cm (3 in.) Knelson concentrator. It varied between the thirties for the primary mill discharge and two cyclone overflows, to highs of 89% and 92% for the PCUF and secondary mill discharge."

Jan 1, 1991

By Yoshitaka Mitsuda, Masao Miyake, Masafumi Maeda

A leaching treatment was investigated to recover metals including rare earths from the mixtures of hydrogen storage alloys and nickel hydroxide. A potential-pH diagram of the La-Ni-H20 system including the domain of stability of LaNi5 was drawn to find appropriate leaching conditions. Alkaline solutions containing ligands that form complexes with nickel ions were supposed to be available to separate hydrogen storage alloys from the mixture. When the mixture was leached with ammoniacal alkaline aqueous solutions, the nickel hydroxide was dissolved and the hydrogen storage alloy was recovered as its original alloy.

Jan 1, 2004

By M. Reza Bateni, M. Zandrahimi, J. A. Szpunar

Titanium aluminides and nickel aluminides offer the potentials, as coating materials, for high temperature and aerospace applications. In this research, attempt has been made to develop Al-Ti and Ni-Al intermetallic compound coatings on the surface of Inconel 738. The coatings applied through pack cementation and simultaneous diffusion annealing processes. Scanning-electron microscopy (SEM), energy-dispersive X-ray spectrometry (EDAX) and grazing angle X-ray diffraction were used for evaluating of coating structure. It was demonstrated that the pack cementation technique could be used to develop TiAl3 and AlNi intermetallic compounds coating on Inconel 738 substrate. When pack cementation technique is based on a halide-activated pack with aluminum and titanium powders, the coating consists of TiAl3 intermetallic compound phase. Whereas, by pack aluminization of Inconel 738, the coating consists of AlNi intermetallic compound phase.

Jan 1, 2004

By M. Leroux, J. A. Finch

"Sizing below 38 µm (400 mesh) is an increasing requirement in mill testing laboratories. The Cyclosizer is gaining wide acceptance in this role. A recent alternative is to use electro-formed sieves (micro-sieves), which are available with openings down to 5 µm. The advantage of micro-sieving is a cut size which is independent of mineral density, easier retention of the fi nest fraction and reduced purchase cost. A simple method of microsieving using an ultrasonic bath, which performs readily to 10 µm, is described.A systematic study of Cyclosizing and micro-sieving is reported for three samples; silica, copper oxide and a lead concentrate. Micro-sieving gave comparable results. Comparison with a standard sizing method, the Sedigraph 5000D, revealed misplaced material in each fraction by both methods. The range for micro-sieving was from 20% to 60% depending on the sieve and material; for the Cyclosizer it was a consistent 40-50% for all cones and all materials. The Cyclosizer can be sensitive to feed mass and particle size for dense materials. It is recommended that for minerals of specific gravity greater than 5, no more than 35 g of -38 µm be used.The disadvantage of micro-sieving is that it requires continuous operator attention and sieving time depends on sample mass. To fractionate 35 g-as used on the Cyclosizer and considered at reasonable mass for mill testing purposes-through 25-, 15- and 10-µm sieves requires about 80 minutes.IntroductionParticle size has a pronounced influence on mineral separation processes. Consequently, the measurement of particle size plays an important part in mill testing. By far the most common method is by screening. This, however, is usually limited to 38 µm (400 mesh) or occasionally 25 µm (500 mesh). Increasingly, mineral products are becoming finer than this limit and consequently finer sizing methods are required."

Jan 1, 1982

By C. Desmeules

"Carbon addition in the oxide pelletizing process is a big concern at the Sidbec-Normines pelletizing plant since 1976.Laboratory pot-grate testing carried out before the initial start-up of the Port-Cartier plant indicated that the nominal pelletizing grate capacity could be increased by fifteen per cent with a suitable carbon addition. Also an improved induration cycle offered the possibility of a significant energy reduction within the process with no adverse effect on pellet quality. A one-month plant scale program duplicated the lab test results and confirmed the anticipated cost saving by using these techniques. Since March 1980, Sidbec-Normines used coke addition as a current operation.This paper reviews briefly earlier laboratory and in-plant test work carried out to investigate the effects of adding carbon materials to the Fire Lake hematite concentrate, and presents operation techniques and plant results of carbon addition in the Port -Cattier pellet plant.IntroductionThe Sidbec-Normines pelletizing plant at Port-Cartier, Quebec, is designed to produce six million ton s per year of oxide pellet s. It is a Dravo-built two-line plant; one line to produce three million s tons per year of blast furnace grade pellets averaging 5.5 per cent silica, and another line of three million ton s to produce direct reduction grade pellets of about 2.0 percent silica.The laboratory pot-grate test program was conducted in 1977 at the British Steel Corporation Research Laboratories in England, with the assistance of J .E. Appleby, consultant to British Steel Corporation (overseas services) Limited.The purpose of that test program was to determine the optimum energy saving cycle and to study the physical and metallurgical effects on blast furnace and direct reduction pellets."

Jan 1, 1983

By S. Banisi, M. Maleki-Moghaddam

Direct observation of charge shape and its motion in industrial mills is not possible; therefore, a combination of analytical and physical studies is used to determine charge trajectory. Software packages, which predict charge motion consider only the outermost layer of charge (single ball) and ignore the charge and the interactions of grinding elements. In the new version of the GMT (Grinding Media Trajectory) software, the effect of liners specification and bulk load on charge shape and trajectory are considered. The charge trajectory was measured in a laboratory mill with the diameter of 100 cm and length of 21.5 cm with the transparent end and compared with that of the old version of GMT. Four types of polyurethane rings were accurately machined to scale down the liners arrangements at two industrial mills. The model mill was operated at 55, 70 and 85% of the critical speed for five levels of mill filling (10, 15, 20, 25% and 30% by volume). The experiments indicated that the end walls effect was negligible for the model mill with the length of 10.8 cm and beyond. The proposed relationships to correct the trajectory and charge shape were validated by using the new liner of the Gol-E-Gohar iron ore company AG mill. The positions of shoulder, toe, toe departure and impact points were predicted with the relative errors of 5, 0.7, 2 and 0.2%, respectively. The GMT software was updated with the new relationships. The results of GMT simulation indicated that when the lifter face angle increased from 7 to 30°, the distance between the charge impact point and the toe decreased from 40.1 to 11.2° for 30% filling. The change in the position of the impact point meant increasing the probability of charge impacting the toe, not the liner which favored more efficient comminution practice.

Jan 1, 2016

By D. Kao, J. Gogal, S. Humphrey, T. Byrne, M. Davoodi

"High total and dissolved uranium values were noted in the process water at the Cigar Lake Operation (CLO) during early production start-up period, whereas significant levels of dissolved uranium had not been observed previously at similar operations. The excess dissolved uranium resulted in higher demands on the water treatment plant, along with higher operating costs, environmental risks and some unrealized revenue potential. A species balance indicated that uranium was leaching into solution in the grinding, dewatering, and storage circuits under normal operating conditions. Jet boring, water recycle, ball milling, and the use of Pachuca tanks for ore storage results in a highly oxidative environment, which is favourable to leaching.This paper will outline the testwork performed to identify the conditions under which the uranium leaches into solution and to determine required conditions for uranium precipitation. Maximum uranium leaching was found to occur under normal operating conditions (pH ranging from 7.0 to 8.5); testwork indicated that both lowering and raising the pH can significantly reduce the uranium leaching. Analytical results combined with the batch scale testwork indicate that the uranium solubility is associated with carbonate species in the ore. Uranium precipitation was maximized at pH values greater than 10.5 or less than 6, corresponding well to carbonate leaching and precipitation values from literature. Higher precipitation efficiencies were noted at high pH ranges.As a result of this work, a pH control system has been implemented in the Pachuca storage vessels and thickener prior to water treatment plant on a trial basis. Caustic soda is recommended for pH control due to ease of operation, economic viability and material requirements and downstream constraints."

Jan 1, 2016

By G. D. Hibbard

New regions of material property space can be accessed by combining microstructural design at the nm-scale with architectural design at the µm- or mm-scale. In the first case, large strength increases associated with grain size reduction to below 50 nm have driven extensive research efforts into the development of nanocrystalline materials [e.g. 1-3]. For many potential structural applications, however, the density of a nanocrystalline material is just as important as its strength. In fact, reducing the density is more important than increasing the strength for certain weight specific materials performance indices, and it is especially critical for applying structural nanomaterials in the aerospace and automotive sectors. We have developed a new type of structural nanomaterial wherein the effective density of the parent metal is reduced by more than an order of magnitude by incorporating an internal periodic cellular architecture of open space. In one example a low density cellular nanocrystalline material was created by electroforming nanocrystalline Ni around a rapid-prototyped acrylic photopolymer microtruss, Figure 1 [4]. Microtruss materials have periodic cellular architectures that are specifically designed to undergo stretching-dominated deformation as opposed to the bending-dominated deformation in conventional open cell metal foams [5,6]. This new cellular nanocrystalline hybrid material combined the structural efficiency of microtruss architectures with the ultra-high strength that can be achieved by grain size reduction to the nm-scale. Although it played a critical role as a cathode support during the initial stages of nanocrystalline electrodeposition, the polymer core did not contribute significantly to the inelastic buckling resistance of the composite metal/polymer struts and it may therefore be desirable to remove it post deposition by means of chemical dissolution or thermal decomposition [4]. Nanocrystalline electrodeposition can also be used to reinforce conventional cellular metals (Figure 2), creating new types of cellular composites such as metal/metal microtruss hybrids [7-10] and metal/metal foam hybrids [11,12]. For example, nanocrystalline Ni-Fe alloy sleeve thicknesses of up to 400 µm were used to reinforce an aluminum alloy microtruss that had been fabricated using a stretch-bend approach; the nanocrystalline sleeves had the effect of increasing the microtruss strength by up to a factor of twelve and the specific strength by a factor of three [8]. Alternatively, much thinner sleeves can be electroplated to produce structural coatings. In one example, a nanocrystalline Ni coating was designed to provide both corrosion protection and inelastic buckling resistance [10]. Because the ultra-high strength material was optimally located at the furthest distance from the neutral bending axis, only a thin coating of 50 µm was needed to double the inelastic buckling resistance of the 1.13 mm x 0.63 mm cross-section plain carbon steel struts [10]. Overall, the mechanical performance increase that can be obtained through electrodeposition depends on a complex interaction between the starting cellular architecture and the nanocrystalline sleeves.

Jan 1, 2010

By Z. X. Cui, X. D. Ma, L. Contreras, X. Jiang

The bath smelting process is one of the key techniques applied in the current copper smelting production, which includes bottom-blown and side-blown furnaces differently from the direction of gas injection. Liquid matte and slag form the bath in the smelting furnace. To better understand the fluid dynamic of the bath and further optimise the operational efficiencies in the smelting furnace, physical simulation of the bath in the horizontal cylindrical reactor was investigated. The mixing behaviour and wave motion of the bath in the bottom-blown and side-blown furnaces have been studied systematically. The mixing time is reduced with increasing gas flowrate and height of the lower layer, while it increases significantly with increasing the height of the upper layer. The wave motion in the furnaces can be suppressed with the presence of the upper layer, but the bath with a lower density generates higher wave amplitude. Overall, in comparison to bottom-blown mixing, side-blown mixing shows better mixing efficiency and lower wave amplitude. In addition, the plume eye and splash phenomena occurred in the bottom-blown furnace have also been studied. INTRODUCTION The bath smelting process is one of the principal techniques used in the current copper making industry. The bath smelting techniques have some advantages of high smelting efficiencies, low capital costs, low energy consumptions and reduced dust generations. From the direction of gas injection, the bath smelting techniques can be classified into five general types: (1) top-submerged blown, e.g. Ausmelt and Isasmelt; (2) top-suspended blown, such as Mitsubishi smelting; (3) top direct-to-copper smelting, such as Outokumpu smelting; (4) submerged side-blown, such as Noranda and Teniente smelting; (5) bottom-blown, such as Dongying Fangyuan bottom-blown copper smelting furnace (Schlesinger et al., 2002; Zhao, Cui, & Wang, 2013; Perez-Tello et al., 2018). In many metallurgical processes involving bath smelting situations, the objectives of agitation are to accelerate the bath homogenization inside the bath which makes a significant contribution to process efficiency and product quality. Extensive mixing studies have been performed for ladle refining and tundish associated to steelmaking processes through water physical models. Mixing time is the parameter used to quantify the efficiency of mixing in the liquid bath and the first empirical equation predicting mixing time was proposed by Nakanishi, Fujii and Szekely (1975). Later on, more systematic studies have been carried out on ladle mixing and researchers realized that the geometry of the vessel could also have a significant impact on mixing (Khajaviand & Barati, 2010). However, the investigations using ladles which are vertical cylindrical vessels, cannot be directly used in the study of mixing behaviour in horizontal cylindrical reactors. Understanding the fluid dynamics inside horizontal cylindrical bath smelter is useful from the industrial perspective. Recently fluid dynamics of horizontal cylindrical smelter related to copper smelting have been studied by the authors’ group (Shui et al., 2015a, 2015b, 2018a; 2018b; Xu et al., 2018, 2019).

Jan 1, 2019

By L. M. Nolan

Chemical Mechanical polishing, or CMP, has four components in the polishing interface; namely the polishing pad, the polishing fluid, the abrasives in the fluid, and the surface being polished. Understanding the way that load is transferred between these components is key to understanding and predicting wafer polishing. Numerous models of CMP and the different load sharing arrangements which occur between these four components have been proposed. These include models by Luo and Dornfield (1) and Fu, Chandra and colleagues (2). Other models focus on just one or two loading arrangements, such as `hydroplaning' when all load is transmitted by the liquid in the case of Runnels and Eyman (3). In this work, we consider four possible combinations of load transfer from pad to wafer in CMP. These combinations are listed below in Table 1 and are illustrated schematically in Figure 1. It is important to note the role of scale in this process; the illustrations in Figure 1 are drawn to scale from actual profilometer scans obtained over a length of 5 with particles of 150 nm in diameter. Table 1 - Load Transfer Combinations Load Regime Illustration Wafer - Fluid - Pad Figure la Wafer - Particles/Fluid - Pad Figure lb Wafer - Particles - Pad Figure lc Wafer-Pad Figure ld The interest in load-sharing between the system components is because some configurations are anticipated to achieve higher polishing rates than others. For instance, in hydroplaning, or hydrodynamic lubrication, the lateral force exerted on the polished surface by the particles can be no higher than the fluid shear force developed in the gap between the pad and wafer. This is not expected to generate high rates of material removal from the surface (4). For contact that is largely between the pad and the wafer, such as the regime depicted in Figure ld, the lateral load is transmitted to the wafer by the pad and is hence limited by the pad's low rigidity. This regime is not expected to generate high material removal rates either. The highest levels of material removal are expected from regimes where the mechanical load exerted on the system is transmitted by the particles, in combination with either the fluid or the pad. Under what circumstances does the polishing regime change from one to another? What must occur in order to initiate or terminate contact between the system components? This is an ongoing question in the field of tribology, and has traditionally been viewed in terms of the pressure and velocity applied to the system, the thickness of the fluid film between the two surfaces, and the roughness of those surfaces (4). In this paper, we propose a new mechanism ? that the load on the particles may be sufficient to totally embed them in the polishing pad, at which point they are no longer able to transmit load and polish the wafer surface. This is illustrated schematically in Figure 1(d).

Jan 1, 2010