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By Amir Rehmat

The Institute of Gas Technology has developed a fluidized-bed process for recovering direct reduced iron from blast furnace flue dust a material currently considered to be a waste from the iron and steel industry. In the process, a portion of the carbon in the flue dust is combusted to supply energy for the endothermic reaction between carbon and steam. The reaction produces reducing gases comprised of carbon monoxide and hydrogen both of which react with iron oxides to produce reduced iron. Up to 95 percent of the iron oxides contained in the waste stream can be reduced to elemental iron. The vitiated reducing gases emanating from the process can be used as fuel in the plant. The yield of iron depends upon the quantity of iron oxide present in the flue dust and generally ranges from 20 to 30 percent of the waste stream. The investment cost estimated for a single processing train dedicated to one steel plant can be recovered in less than one year.

Jan 1, 1996

By N. V. Gorelikova

A new type of zirconium mineralization has been recognized in the Devonian volcanic rocks from an orogenic depression in the Central Kazakhstan. The most characteristic features of this deposit are the fine-grained nature of the zirconium mineralization, an unusual texture of the zirconium ores, and a close association of zirconium with phosphorus in the ores. Zircon grains form fine globular aggregates with the features of hexagonal crystal habit. In addition to crystalline zircon, the ores contain metacolloidal zircon, similar to hydrozircon. The morphological and textural features of the zirconium ores suggest that the deposition of ore deposits took place at a low temperature from colloidal solutions. It is believed that this deposit should be considered to be a new type of zirconium mineralization that is related to low-temperature hydrothermal processes.

Jan 1, 1995

By Emilia Visileanu, Eftalea Carpus

"Ecological economic policy shall be understood as the sum of political, economical and environmental measurements aimed at the entire economy dematerialization and the dematerialization shall be ""imposed"" since the designing stage of goods and services"". European textile and clothing industry with a long leading tradition in terms of innovation, fashion and creativity, continues to be one of Europe's major industrial sectors. Textile industry affects the environment by high consumption of water, energy and chemicals, as well as by the large amount of waste it generates as a result of using a large number of chemicals and technological processes.Textile waste prevention, reduction and ecological exploitation require the implementation of new management and education tools.Introduction“Europe must learn from the experience of global economic and financial crisis ""- this was the conclusion of the European Commission that has elaborated a ten-year strategy designed to reinvigorate the economy and make possible a growth which is ""intelligent, sustainable and favorable to inclusion"", by a better coordination of national and European policies.Adapting infrastructure and logistics that encourage the marketing of ""sustainable"", ""fair traded"" and ""green"" products as well as other special „green” products will facilitate the movement towards dematerialization and eco-efficiency among producers."

Jan 1, 2012

By Martin Brueggemann

In 1993, the El Paso Smelter began operation of the first commercial CONTOP copper smelting furnace. The CONTOP process was chosen for the plant modernization due to its low capital cost and the ease that it could be incorporated into a 100 year old existing smelter. After four years of operation, CONTOP has proved itself to be a reliable copper smelting technology. This paper will discuss a brief start-up history, current operation, and future modifications and improvements.

Jan 1, 1998

By Hyun Kyu Shin, Byeong Deok Lee, Young Eun Lee

The reduction of Mn oxides at pre-smelting steps is an integral part of smelting processes for Mn alloys, and an understanding of its reaction mechanism is expected to contribute to the improvement of processing efficiency for Mn alloys smelting. The phase diagram shows that five Mn carbides are operative in the Mn-C system. Although they are expected to participate in the reduction of Mn oxides, no specific information is available yet to clarify their roles in presmelting carbothermic reaction of Mn oxides. Experiments with composite pellets prepared with Mn oxides and graphite powders show that Mn3O4 is reduced initially to MnO at about 1130oC and, subsequently, to Mn7C3 carbide as temperature increases further. At 1331oC, Mn7C3 carbide dissociates to Mn alloy and carbon. The degree of reducing reaction increases with increasing carbon balance in composite pellets and increasing temperatures.

Jan 1, 2014

By Marta Cabral, C. A. Nogueira, F. Margarido

"Physical processing of spent batteries which includes shredding and sieving operation is the first step for chemical treatment by hydrometallurgy. A laboratory study was carried out to evaluate physical processing efficiency, by analysing the resulting particle size, of alkaline and saline mignon-type Zn-MnO2 batteries. After shredding with a tip shredder, results obtained showed that alkaline batteries were more efficiently size reduced than saline batteries. Difference in particle size distribution was larger for granulometric fraction -20+11.2 mm and also higher for saline batteries. Average diameters (d50) for saline and alkaline batteries were respectively 9.1 and 6.2 mm. Chemical composition carried out on several granulometric fractions allowed to identify metals distribution through size categories. This analysis showed that zinc concentration with the grain size was almost constant, while manganese decreased when particle size increased. More than 95% of iron scarp from the battery cases had a particle size higher than 5.6 mm.IntroductionRecycling process of spent batteries includes physical unit operations which involves a fragmentation step in order to open the battery cases and to allow the access of chemical reactants to the electrode materials, on further chemical unit operations. Shredders are usually used for that purpose, using cutting mechanisms and allowing efficient fracture of residues in order to promote further processing of the contained materials. Batteries are complex products with a large variety of sizes and shapes which causes serious difficulties for predicting and carrying out its fragmentation.Domestic-type batteries are essentially of the Zn-Mn systems and with cylindrical shape, varying from the large size Mono (or D) type to the small size Micro (or AAA) type [1]. Recycling of batteries involves collection, sorting [2] and metallurgical processing [3, 4]. In some processes, the first step of metallurgical processing is dismantling and size reduction by shredding. Research work on spent batteries considering grinding/shredding and physical separation of fractions is scarce [5-7], but investigation in this domain is very necessary."

Jan 1, 2008

By Baokuan Li, Qiang Wang, Zhu He

"A mathematical model has been developed to investigate the magnetohydrodynamic (MHD), thermal, and solidified behavior in electroslag remelting process. Based on the finite volume method, a multiphase coupling MHD approach is employed to investigate the droplet formation as well as movement in molten slag under the action of an alternating current. The VOF formulation is adopted for interface tracking. The electrical potential method is adopted for the electric current and magnetic field. The Electromagnetic force and Joule heating are recalculated at each time step and then is implemented in the momentum and energy equations as a source term, respectively. Moreover, solidification of the metal is described by an enthalpy-based formulation, while the mushy zone is treated as a porous medium with porosity equal to the liquid fraction. The model is used to investigate the effect of electrode tip shape on MHD, thermal, and solidified behavior and provide valuable information.IntroductionElectroslag remelting (ESR) process has been used widely to produce high-performance alloys dedicated to critical application, such as hot work tool steels, nickel base alloys, the manufacture of components in aerospace and landbased turbines, etc. Figure 1 shows a schematic diagram of ESR process including a consumable electrode, a molten slag pool, a liquid metal pool, a solidified ingot, and a water-cooled mold. Alternating or direct current flows from the electrode to the water-cooled baseplate through the high resistivity calcium-fluoride-based molten slag which result in Joule heating and Electromagnetic force (EMF). Part of the Joule heating melts the electrode and the droplets travel through the slag and accumulate the liquid metal pool. The electrode is continuously advanced into the slag as it melts to build up an ingot of improved structure and composition by controlled solidification and chemical refinement. The metallurgical properties of the remelted ingot are really related to the solidification structure, which strongly depends on magnetohydrodynamic, thermal, and solidified behavior in the molten slag, liquid metal pool, and mushy zone."

Jan 1, 2014

By Honggang Zhong, Tan Yi, Qijie Zhai, Zhao Dan, Xinping Mao, Huigai Li

"The influence of superheat degree on the distribution and volume content of inclusions were studied in 65Mn thin slab produced by compact strip production(CSP) in Zhujiang Steel in China, The results showed that the diameters of inclusions are mainly less than 5µm. Most of the inclusions gathered at the 1/4 thickness direction for the thin slab of 27? superheat degree, compared with the center position for that of 37?. There are more inclusions larger than 50µm in the low superheat samples, which is caused by the short floating time. In addition, the inclusions were observed and analyzed by metallurgical microscope, SEM and EDS in order to ensure their composition, type and further find their source. It was find that the types of these inclusions mainly are Al2O3, SiO2,CaO and their composites, a few of them are TiN and MnS.IntroductionIt is well known that inclusions have a great impact on the strength, plasticity, fracture toughness, cutting performance, fatigue property and corrosion resistance of steels. Especially, with the demand for thinner slab, the cleanness is increasingly becoming more significant as a quality criterion[1]. High manganese and carbon steels not only demonstrate high strength but also proper plasticity. There are many problems unsolved for 65Mn steel as a result of the low solidification rate, bad thermal strength, crack sensitivity and low casting temperature[2,3].The superheat of the molten steel has a great impact on the erosion of refractory lining, molten steel fluidity and non-metallic inclusion behavior[4]. The serious erosion situation of ladle lining, nozzle and casting tundish will give rise to more inclusions at a high superheat. Meantime higher superheat will make second dendrite arm spacing coursing and element segregation which lead to inclusion, bubble formation and shrinkage cavity. On the contrary, it is hard for non-metallic inclusions to float up with a low superheat value. Inclusions of 65Mn steel, which produced in different superheat condition by CSP, were studied for the sake of higher slab properties including statistics and EDS analysis."

Jan 1, 2012

By Chao Li, Qian Li, Yong-bin Yang, Kai Li, Qiang Xie, Yuan-yuan Zhu, Dong-ye Li, Qi-bing Tan

"The permeability of sintering mix is a vital technological property in sintering process. However, it can only be measured by off-line method on samples picked from the production. In order to acquire the properties of sintering mix accurately, on-line measuring of permeability is urgently required. Based on the reflection characteristics of bed permeability on pipe flowing parameters, a new method is presented in this paper for on-line measuring of sintering mix permeability. The measurement can be performed by blowing gas flow in the bed with the measuring pipe. Measuring results are obtained by picking the data on flowing rate and pressure in the pipe. The function of flowing rate to pressure may be certain for samples with the same permeability. Thus, the permeability was determined by contrasting this function to the result of off-line measuring, and the relative coefficient or R2 value was more than 99%.IntroductionThe permeability of sintering mix is a vital technological property in sintering process, which directly determines production and quality of sinter, or even determines whether the sinter production is carried out smoothly [1,3].The permeability have more obvious influence on vertical sintering speed, which is mainly related to air quantity passing through material bed. Under certain inducing capacity and negative pressure, the vertical sintering speed mainly depends on the permeability of sintering mix. Low permeability may make burning through point of sintering move back, and the sinter mix cannot be burnt through. High permeability may make burning through point of sintering move forward, improving production efficiency by increasing the speed of sintering machine [4] Good permeability means a small resistance of fan ,reduction of negative pressure of sintering machine, and full contact between air and sulfide, which can strengthen physical-chemical reaction during sintering process and increase desulphurization rate. In gas well through material layer process, gas-solid desulfurization reaction and gas-solid-liquid heat exchange are completed and hot gas through the combustion zone supplies the sintering process with heat. Finally uniform sintering of the material layer in height and width direction is achieved [5] While high permeability index leads to weak sinter strength, fast sintering speed, short residence time of high temperature region and little liquid phase. Moreover, liquid phase in the fast cooling process is too late to fully crystallize but forming glass phase which is harmful to sinter strength as well. Bad permeability means a big fan resistance and increase of negative pressure of sintering machine, which make the air pass through material layer difficultly. When air and mix contact difficultly, removal of sulfide reduces so that desulfurization is incomplete. Meanwhile, low caking efficiency, slow sintering speed and easily burnt sinter , reduce sinter output. Therefore appropriate permeability of sintering mix is the premise of stable burning through point and satisfactory sinter output and quality."

Jan 1, 2013

By Richard D. Hagni

The United States is dependent upon foreign sources for more than 93% of its bauxite and alumina supply. Domestic production of bauxite, which comes from Alabama, Georgia and Arkansas, is limited to those bauxite ores containing less than about l ½ % iron. Bauxites with higher iron contents are generally not utilized because they cause problems in bauxite calcining and especially because they produce undesirable brick discoloration and cracking. In order to improve beneficiation and expand the utilization of high-iron or ferruginous bauxites, a mineralogical and textural study has been conducted on selected samples from the Eufaula, Alabama, bauxite district. Reflected light microscopic, petrographic, and X-ray techniques have shown that a variety of iron minerals are present, including hematite, goethite, lepidocrosite, siderite, pyrite, marcasite, and ilmenite. Although the iron minerals may be locally concentrated into concretions and pisolites, most occur as very fine grains that are disseminated and show a variety of intergrowths. Mineralogical and textural observations indicate that the fine-grained iron mineral grains may be amenable to high gradient magnetic separation.

Jan 1, 1981

By Gerardo H. Achurra

During the last years, the Caletones Smelter, like others copper smelters in the world, has evolved from the conventional, inefficient, pollutant and expensive technologies, to modern, environmentally friendly and efficient ones. For this reason' as well as to improve its competitive position this Smelter shut down the reverberatory furnace, started up two big acid plants and has developed some pyrometallurgical technologies. The main facilities of the Caletones Smelting and Converting Process, in the present and the future, are the Teniente Converters, the reactors with a high operational availability that have reached concentrate top process capacities near to 2,400 tpd. These reactors operate in most of Chilean smelters as well as in other smelters in the world such as in Zambia, Peru and Mexico. Since 2000, the Caletones Smelting and Converting Process, has been adapted in two Teniente Converters, four Slag Cleaning Furnaces and four Pierce -Smith Converters. These facilities, together with the operation of two Fluidized Bed Dryers and two Oxygen Plants have allowed to reach concentrate smelting capacities and copper productions of 1,250 ktpy and 380 kfipy, respectively. Associated to EI Teniente Division Expansion Plan, Caletones Smelter, in the first stage, will increase its capacity to 1,440 ktpy in 2004. In the long term, Caletones has different options, such as the processing of 1,600 to 2,000 ktpy of concentrate, producing anodes, white metal or a mixture of them. These options are connected with CODELCO's Smelters & Refineries Strategic Plan, including Mejillones Project. The main challenges of Caletones Smelter are associated to the development and the consolidation of the Continuous and Environmental Friendly Processes, automation and control of different processes and to the improvement of its leadership between other Copper Smelters in the world.

Jan 1, 2003

By Jorge A. S. Tenorio, Chuanwei Zhuo, Joner O. Alves, Yiannis A. Levendis

"The ever increasing number of automobiles and the consequential increase in consumption of tires have generated a pressing environmental issue, concerning the disposal of unserviceable tires. The worldwide disposed of waste tires is approximately 1 billion units per year and this amount is expected to increase by 2% each year. This work presents a microstructural characterization of nanomaterials synthesized in a catalyst system from the effluent of burning waste tire chips in a horizontal two-stage laminar-flow furnace. Controlled combustion of waste tire chips took place at temperatures of 900 or 1000 °C, and stainless steel meshes were used to synthesize the nanomaterials at 1000°C. Produced materials were analyzed by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The catalyst meshes were covered by materials with diameters of 20 to 200 nm and lengths of about 40 µm. They possessed structures similar to those of carbon nanotubes.IntroductionThe motor vehicles on the road have been increasing annually. World motor vehicle production in 2009 approached 62 million units. Consequently, the consumption of tires has also been on the rise; about 1.4 billion units were produced around the world in 2007 [l]. The disposal of scrap tires is a serious environmental problem. The worldwide disposed of waste tires is almost 1 billion units per year with an expected increase of around 2% each year. However, less than 7% of produced waste tires are recycled (excluding reuse, retreading or incineration). The waste rubber tires are a thermoset polymer, which cannot be reprocessed like thermoplastics polymers, therefore the recycling of this material requires special techniques that demand big investments [2, 3].A solution to the disposal of waste tires is the sequential pyrolysis/combustion process. Past research showed that waste tires are an attractive potential fuel due the high heating value (29-3 7 MJ/kg), which is comparable, or even higher to those of typical bituminous coals [ 4, 5]. Pyrolysis is a process wherein the material is thermally decomposed at elevated temperatures at the absence of an oxidizing gas. Combustion is characterized by the addition of the oxidizing gases during the process. Several studies indicate that the pyrolysis and combustion processes for the tires treatment have a great energy conversion potential [4, 5, 6]."

Jan 1, 2011

By E. Daniel Baker

"The term ""oxide disseminated gold deposits"" refers to near surface, gold-bearing veins, faults, and shear zones that typically contain appreciable amounts of oxidized ore or gossanous material, resulting from oxidation of sulphides.The concept of oxide gold deposits underwent a dramatic change after the discovery of the Carlin gold mine in north-central Nevada in the early 1960's. Now the term implies large tonnage, low-grade bulk minable deposits that are processed by milling and/or heap leach methods.Oxide gold deposits may now be classified into two types: (1) primacy ores derived directly from the effects of hydrothermal alteration on host rocks, and (2) secondary oxide ores derived from the supergene oxidizing effects of circulating post-mineral meteoric waters on gold-bearing sulphides. Each type of deposit has unique diagnostic mineralogic and metallurgical characteristics that must be addressed to achieve successful exploration strategies and viable metallurgical exploitation.The author would like to thank the management of Newmont Metallurgical Services and Newmont Mining Company for allowing presentation of this paper. Thanks are due Sevkett Acar, Donald M. Hausen, Jerry R. Odekirk, and D. Erik Spiller for their critical review of the manuscript. Also, thanks are extended to all those cited and uncited whose hard work and dedication have led to the discovery and exploitation of near-surface oxide gold deposits. Our knowledge would be greatly limited without the dedication and research of many others."

Jan 1, 1997

By Gerardo H. Achurra

During the last years, the Caletones Smelter, like others copper smelters in the world, has evolved from the conventional, inefficient, pollutant and expensive technologies, to modern, environmental1y friendly and efficient ones. For this reason as wel1 as to improve its competitive position this Smelter shut down the reverberatory furnace, started up two big acid plants and has developed some pyrometal1urgical technologies. The main facilities of the Caletones Smelting and Converting Process, in the present and the future, are the Teniente Converters, the reactors with a high operational availability that have reached concentrate top process capacities near to 2,400 tpd. These reactors operate in most of Chilean smelters as well as in other smelters in the world such as in Zambia, Peru and Mexico. Since 2000, the Caletones Smelting and Converting Process, has been adapted in two Teniente Converters, four Slag Cleaning Furnaces and four Pierce Smith Converters. These facilities, together with the operation of two Fluidized Bed Dryers and two Oxygen Plants have allowed to reach concentrate smelting capacities and copper productions of 1,250 ktpy and 380 kftpy, respectively. Associated to El Teniente Division Expansion Plan, Caletones Smelter, in the first stage, will increase its capacity to 1,440 ktpy in 2004. In the long term, Caletones has different options, such as the processing of 1,600 to 2,000 ktpy of concentrate, producing anodes, white metal or a mixture of them. These options are connected with CODELCO's Smelters & Refineries Strategic Plan, including Mejillones Project. The main challenges of Caletones Smelter are associated to the development and the consolidation of the Continuous and Environmental Friendly Processes, automation and control of different processes and to the improvement of its leadership between other Copper Smelters in the world.

Jan 1, 2003

By Kan Song, Lin Liu, Hengzhi Fu, Jun Zhang, Haijun Su, Xiaojiao Jia

"Al2O3/YAG/ZrO2 eutectic in situ composite has been regarded as new generation of high temperature structural material due to its excellent performance even close to its melting point. The directionally solidified Al2O3/YAG/ZrO2 eutectic ceramics are prepared by recently developed Laser Floating Zone Melting (LFZM) apparatus in which a splitter mirror is used to obtain two beams with the same quality from one CO2 laser. With the two laser beams irradiate the sample from opposite directions, the sample is zone melted. The apparatus configuration and the solidification processing are described in detail. The solid/liquid interface morphology is studied and the mechanism of microstructure formation especially the characteristic of eutectic cellular is discussed. It is shown that YAG and ZrO2 phases play a leading role during the ternary eutectic growth. Meanwhile, the relationship between the solidification microstructure and the processing parameters are investigated.IntroductionAl2O3/YAG/ZrO2 ternary eutectic in situ composite, due to its excellent high temperature mechanical properties, is now considered to be a promising candidate material as a replacement of nickel based super alloy for new generation aero space engine turbine blade [1]. They exhibit flexural strength of 360-500 MPa from room temperature to 2073K in air atmosphere [2]. The compression creep strength at 1873K is 433MPa with the strain rate of 104/s [3]. However, because of the high melting point and complex physical properties, there remain still many difficulties for its application. One of the bottlenecks is the poor understanding of the relationship between microstructure and solidification conditions."

Jan 1, 2012

By L. Katgerman, H. J. Brinkman, J. Duszczyk

"The phase formation sequence in the in-situ synthesis ofTiB2 in A1 from elemental A1, Ti and B powders is identified with a combination of DSC and XRD. After the melting of A1, A1B2 and A13 Ti are formed at the contact areas between A1-B and A1-Ti. The influence of variations in starting composition on the reaction kinetics is explained in terms of there effect on the different processes in the formation sequence. Parameters in the starting composition that were investigated are; fraction ofTiB2 forming reactants, non stoichiometric Ti:2B ratio's, and addition of alloying element Cu.It was found that a liquid Al phase is necessary for the in-situ TiB2 forming reaction from the intermediate A1B2 and A13 Ti phases. If all Al is consumed by the formation of A1B2 and A13 Ti the TiB2 formation is halted until the decomposition of A1B2 and A13 Ti .Overstoichiometric amounts of B are needed for complete conversion of the Ti, present in A13Ti, into TiB2 This is explained by the fact that some of the stable A1B12 phase is formed after the decomposition of A1B2•The addition of Cu leads to an increasing reaction rate in the A1-Ti reaction. A possible explanation for this is that the A1-Cu liquid penetrates more easily between the Ti and its surface oxide than the unalloyed A1 liquid."

Jan 1, 1998

By Joseph D. Lessard

A process simulation of the conversion of molybdenum disulfide concentrates into molybdenum dioxide via the Looping Sulfide Oxidation process has been performed using HSC 7.1 thermodynamic software. By decoupling molybdenite conversion and molybdenum oxidation, Looping Sulfide Oxidation changes the paradigm by turning molybdenite processing into an energy generator while producing a molybdenum dioxide, which has a lower vapor pressure and lower oxygen content than molybdenum trioxide. The Looping Sulfide Oxidation process selectively produces molybdenum dioxide over molybdenum trioxide. This process uses a stoichiometric mixture of oxygen and molybdenum trioxide as oxidants in the conversion of the molybdenum sulfide to the molybdenum oxide. The model simulates the two reactor scheme required by Looping Sulfide Oxidation and incorporates thermodynamic equilibrium simulations performed in FactSage 6.3.1 thermodynamic software. Energy capture is also maximized with heat exchanger systems to transfer heat released in reactions to preheat air.

Jan 1, 2014

By J. H. Puffer

The copper mineralization of the Mesozoic Passaic Formation of New Jersey is typical of copper deposits in eastern North American Mesozoic sediments. Most such deposits are located at the base of the first of several basalt flows that are interbedded with continental, red-bed sediments. The copper mineralization is similar in most respects to that of the Keweenawan Basalts of the Lake Superior area. The first basaltic flow units of the eastern North American Mesozoic basins, and the Keweenawan Basalts, are continental quartz tholeiites of similar chemical composition and copper contents. The copper minerals and associated zeolite facies metamorphic mineral assemblages of these two rock units are also approximately the same. Stoiber and Davidson (1959) suggested that Keweenawan copper was mobilized and concentrated during metamorphism. The evidence pertaining to the Mesozoic copper deposits of New Jersey is consistent with such an interpretation and also with DeVore's (1955) suggestion that ore fluids commonly arise as a result of the mobility of metals under metamorphic conditions. There is additional evidence that final metamorphic concentration of Mesozoic copper was preceded by an initial stage of hydrothermal precipitation related to fluids emitted by basaltic magma.

Jan 1, 1987

By Frank L. Marley

Mexican silver mining operations have existed prior to the sixteenth century. Recovery processes throughout the centuries were developed at the many mining localities and have progressed through smelting, the patio amalgamation process to cyanidation and flotation. A study of the present silver mining zones is reported in which the ores are evaluated in terms of the mineralogical constituents, their state in the matrix and the effects these are noted to impose upon the efficiency of recovery. Silver mineral identifications were by quantitative ore microscopic and scanning electron microscopic energy dispersive X-ray analysis.

Jan 1, 1982

By A. G. Jackson, S. J. P. Laube

"Control of thin films during the growth process is dependent on several parameters that are difficult to monitor, including flux of film material, pressure, substrate temperature, composition, and thickness. One means for easing this difficulty is to take advantage of emission spectra associated with the process and the film. For pulsed laser deposition (PLD), the ion cloud generated by the laser has characteristic emission spectra that can be used to control the flux and, hence, the film. For chemical vapor deposition, the species present can be determined using mass spectroscopy and specific peaks can be used to control the deposition. Raman spectroscopy affords the possibility of real-time control by sensing characteristic peaks associated with film composition and thickness. These spectroscopic methods offer a real-time alternative to process control that is very attractive, because of the ability to accurately control films to achieve the engineered structures and properties sought. Examples are presented to illustrate the capabilities of these methods for thin film preparation.IntroductionThe drive to reduce costs and improve efficiencies of operation sets the tone for much of research, basic or applied. Basic research is limited by the ability of sensors and associated instrumentation to measure parameters accurately and reproducibly. Applied research has the same limitations and also the added constraints of time and costs. Hence, there are strong incentives to explore means for refining existing sensors with respect to performance and cost, as well as finding new sensors and techniques for more accurately and rapidly measuring quantities of interest in experiments and in various processes."

Jan 1, 1997